AMAT Endura 1st Gen Heater PM Technique

Carefully place (6) to (8) standard fab wipers around the bottom of the Degas Chamber underneath the Degas Heater (See Fig 5)

Fig 5: Standard fab wipers placed underneath Degas Heater


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BEFORE		AFTER

Vacuum Chamber PM Technique
AMAT ENDURA™ PVD DEGAS Chamber
1st Generation Heater

OBJECTIVE:
TO EFFECTIVELY PM THE APPLIED MATERIALS ENDURA™ PVD DEGAS CHAMBER 1ST GENERATION HEATER IN A TIMELY AND EFFECTIVE MANNER WHILE IMPROVING TOOL RECOVERY AND EXTENDING THE MEAN TIME BETWEEN CLEANS (MTBC)

	Vacuum Chamber:	Applied Materials Endura™ PVD
	Vacuum Chamber Process Residue:	Process Induced Residue
	Vacuum Chamber Components:	Degas Chamber Heater Assembly - 1ST Generation


	Old Procedure:	2+ hours using DI water & IPA with 150+ wipes
		Recovery time: 24 to 48 Hours
		Interval: PM Degas Chamber every 6 days (~1200 wafers)

	New Procedure:	1 hour using DI water & IPA with Diamond
		ScrubPAD, MiraWIPE^® and MiraSWABS^®
		Recovery time: 24 Hours
		Interval: ABLE TO EXTEND CHAMBER PM OUT
		14+DAYS (3000+WAFERS)


	Vacuum Chamber Products:
	AMAT ENDURA Degas Chamber PM Kit
	PM Kit P/N: HT4500-DGAS1
			(1) HT9423 CushionPAD 24” X 24” (Not Shown)
			(2) HT4536D-10-1 360 Grit Diamond ScrubPAD
			(1) HT4536DW-1 360 Grit Diamond ScrubBELT^®
			(1) FTPEN-1 ScrubWRIGHT™ PEN
			(1) HT4754 UltraSOLV® Sponge
			(2) HT1511FC-5 MiraSWABS^® (10 MiraSWABS^®)
			(1) HT5790S-25 MiraWIPES^® (25 MiraWIPES^®)


AMAT ENDURA™ DEGAS Chamber PM Procedure:

View “How to” instructional videos on http://foamtecintlwcc.com/video/

Step 1:	Using proper procedures and safety guidelines prepare AMAT Endura™ Degas Chamber for wet clean

Step 2:	Using proper procedures and safety guidelines remove Degas Heater Cool ring from heater assembly and place on top of HT9423 CushionPAD (See Fig 1, 2, 3 & 4)



		Fig 1 & 2: Removing Degas Heater lift ring

		Fig 3 & 4: Degas Heater with cool ring removed and to be placed on CushionPAD, shown placed on top of fab wipes


Step 4:	Stage a hazardous waste bag next to chamber allowing easy access for rinsing out HT4754 UltraSOLV^® Sponge and Diamond ScrubPAD with DI water

Step 5:	Using DI water, lightly dampen UltraSOLV^® Sponge and HT4536D 360 Grit Diamond ScrubPAD, ensuring items are only lightly dampened and not dripping with DI water (See Fig 6)


	Fig 6: Line basket with plastic bag and lightly dampen UltraSOLV^® Sponge with DI water


Step 6:	Using lightly dampened UltraSOLV^® Sponge, wipe Degas Heater (See Fig 7)


		Fig 7: UltraSOLV^® Sponge wiping Degas Heater


Step 7:	Using lightly dampened 360 Grit Diamond ScrubPAD, scrub an approximate 4” x 4” portion of Degas Heater (See Fig 8)



		Fig 8: Diamond ScrubPAD scrubbing a small portion of Degas Heater


Step 8:	As loosened deposition begins to build up on Degas Heater, take lightly dampened HT4754 UltraSOLV^® Sponge and wipe the Degas Heater free of residue (See Fig 9 & 10)


		Fig 9: UltraSOLV^® Sponge wiping loose residue on surface of Degas Heater

		Fig 10: Residue pulled off of surface of Degas Heater

Step 9:	As ScrubPAD loads up with deposition, pull across the dampened UltraSOLV^® Sponge to unload ScrubPAD (See Fig 11, 12 & 13)


Fig 11: ScrubPAD loaded with deposition	Fig 12: Pull ScrubPAD across UltraSOLV^® Sponge	Fig 13: Unloaded ScrubPAD

Step 10:	As loosened deposition builds up on Degas Heater, take lightly dampened HT4754UltraSOLV^® Sponge and wipe the Degas Heater free of residue (See Fig 14 & 15)

	Fig 14: UltraSOLV^® Sponge wiping loose residue on surface of Degas Heater

	Fig 15: Deposition pulled off of surface of Degas Heater

NOTE:	ENSURE TO RING AS MUCH MOISTURE AS POSSIBLE OUT OF SPONGE BEFORE CONTINUING TO WIPE DEGAS HEATER

Step 11:	Repeat steps 5 – 10, scrubbing the remaining areas of the Degas Heater, ensuring to rinse UltraSOLV^® Sponge and unload 360 Grit Diamond ScrubPAD as necessary

NOTE:	ENSURE TO CONCENTRATE ON REMOVING THE HEAVY BUILD UP ALONG THE EDGES OF THE DEGAS HEATER (See Fig 16)



	Fig 16: Scrubbing the remaining areas of Degas Heater

Step 12:

When cleaning of the Degas Heater is complete, move on to scrubbing the upper region of the Degas Chamber walls using the same technique described above; WIPE – SCRUB – WIPE (See Fig 17, 18 & 19)


	Fig 17: Wiping Degas Chamber wall			Fig 18: Scrubbing top portion of Chamber walls			Fig 19: Wiping Degas Chamber wall clean


NOTE:	CONCENTRATE ON SCRUBBING ONLY THE TOP PORTION OF CHAMBER WALLS (THE AREAS ABOVE HEATER) AND DO NOT ALLOW DI WATER TO RUN BELOW HEATER

Step 13:	Ensure to target all areas within chamber above heater assembly (See Fig 20 & 21)



		Fig 20 & 21: Scrubbing areas throughout Degas Chamber

Step 14:

Ensure to reach into the slit valve and scrub the top and bottom areas of this region (See Fig 22 & 23)



		Fig 22 & 23: Scrubbing top and bottom portion of slit valve area


Step 15:	Rinse out the UltraSOLV^® Sponge with DI water and wipe the entire chamber in preparation for inspection step

NOTE:	THE MICROFIBER CHARACTERISTICS OF THE MiraWIPE^® WILL APPEAR NOT TO ABSORB DI WATER. THE DI WATER MUST BE WORKED INTO THE TIGHT MICROFIBER IN ORDER TO SATURATE WITH DI WATER. THIS CHARACTERISTIC MAKES THE MiraWIPE^® MORE EFFECTIVE IN REMOVING PARTICLES

Step 16:	When entire Degas Chamber has been scrubbed, saturate a single HT5790S MiraWIPE^® with DI water and wipe throughout the entire Degas Chamber (See Fig 24, 25, 26 & 27)


			Fig 24 & 25: Wiping throughout entire Degas Chamber with MiraWIPE^® using DI water

			Fig 26 & 27: Single MiraWIPE^® after wiping entire Degas Chamber with DI water

Step 17:	After wiping the entire chamber with a MiraWIPE^® and DI water, do a thorough inspection of the entire Degas Chamber, looking for areas containing process buildup that may have been missed during initial scrub (See Fig 28)


		Fig 28: Process buildup on the edge of heater missed during initial scrub of Degas Chamber

Step 18:	Moisten second HT4536D 360 Grit Diamond ScrubPAD with DI water and proceed to scrub off the process residue that was missed during the initial scrub of Degas Chamber (See Fig 29 & 30)


		Fig 29 & 30: Second 360 Grit Diamond ScrubPAD scrubbing buildup missed on initial scrub of Degas Chamber

Step 19:	Put HT4536D-1 360 Grit Diamond ScrubBELT^® onto the FTPEN-1 ScrubWRIGHT™ pen and proceed to scrub the edges and tight corners throughout the Degas Chamber (See Fig 31, 32 & 33)


		Fig 31, 32 & 33: ScrubWRIGHT™ pen scrubbing edges and tight areas throughout Degas Chamber


NOTE:	NSURE TO ROTATE THE 360 GRIT DIAMOND ScrubBELT^® AROUND THE ScrubWRIGHT™ PEN AS YOU SCRUB TO PREVENT STRAINING A SINGLE AREA ON THE ScrubBELT^® CAUSING IT TO BREAK

FINAL WIPE PROCEDURE:


IMPORTANT NOTE

THE USE OF HT5790S MiraWIPES^® DURING THE FINAL WIPE PROCEDURE IS A CRITICAL STEP TO EFFECTIVELY REMOVE PARTICLE DEFECTS FROM DEGAS CHAMBER

Figure below shows how much more deposition the Foamtec International MiraWIPE^® can remove from a critical surface compared to the standard fab wiper, making the MiraWIPE^® FINAL WIPE PROCEDURE the most CRITICAL STEP of the PM procedure (See Fig 34a & 34b)


Fig 34a: Current fab wiper after completely wiping Degas chamber		Fig 34b: Particles picked up using HT5790S MiraWIPES^® after completely wiping with current fab wiper


	MiraWIPES^® are the KEY STEP for DEFECT REDUCTION and IMPROVED TOOL RECOVERY


Step 20:	Once scrubbing all the process buildup throughout Degas Chamber is complete, saturate the HT5790S MiraWIPE^® with IPA and perform a complete chamber wipe down (See Fig 35, 36 & 37)


		Fig 35, 36 & 37: IPA saturated MiraWIPE^® wiping out entire Degas Chamber

Step 21:	Replace MiraWIPE® with a fresh MiraWIPE^® as necessary, and continue wiping Degas Chamber until MiraWIPE^® no longer is able to remove process film from chamber

DEGAS CHAMBER HEATER LIFT RING CLEANING PROCEDURE:

Step 22:	Place lift ring on protective workstation in preparation for lift ring scrub (See Fig 38)


		Fig 38: Degas Heater lift ring placed onto protective workstation. NOTE: CushionPAD will replace excess use of wipers as shown here


Step 23:	Using the same technique as described above, scrub entire cool ring with the exception of the wafer picks (See Fig 39, 40, 41 & 42)


		Fig 39, 40, 41 & 42: Scrubbing Degas Chamber cool ring on workstation

NOTE:	IF COOL RING HAS NOT BEEN REMOVED AND CLEANED BEFORE, THEN IT WILL REQUIRE AN ADDITIONAL 360 GRIT DIAMOND ScrubPAD TO EFFECTIVELY REMOVE THE PROCESS BUILDUP (See Fig 43)


		Fig 43: (2+) years of process buildup on lift ring


Step 24:	When scrub of cool ring is complete, saturate HT5790S MiraWIPE^® with IPA and perform a complete cool ring wipe down (See Fig 44 & 45)


		Fig 44: Saturating MiraWIPE^® with IPA

		Fig 45: Wiping down entire lift ring

Step 25:	Prior to replacing the clean cool ring back into the Degas Chamber, vacuum out the Degas Chamber using a certified fab vacuum (See Fig 46 & 47)


		Fig 46 & 47: Vacuuming Degas Chamber with certified fab vacuum

NOTE:	NEVER ALLOW THE TIP OF THE VACUUM TO RUB ANY PORTION OF THE CHAMBER

Step 26:	After vacuuming Degas Chamber, perform a complete wipe of the chamber using additional IPA saturated MiraWIPES^® (See Fig 48, 49 & 50)


		Fig 48, 49 & 50: IPA saturated MiraWIPES^® wiping down Degas Chamber

Step 27:	Place an IPA saturated MiraWIPE^® underneath the heater, then remove the HT4536DW-1 ScrubBELT^® from the FTPEN-1 and using the FTPEN-1 as a tool on top of the MiraWIPE^®, wipe underneath the Degas Heater the best you can (See Fig 51 & 52)


		Fig 51 & 52: FTPEN-1 guiding a saturated MiraWIPE^® beneath Degas Heater


LIFT RING REPLACEMENT PROCEDURE:


Step 28:	Replace the Degas Chamber cool ring by following AMAT's recommended cool ring replacement procedure (See Fig 53)


		Fig 53: Replacing lift ring back into Degas Chamber (1st & 3rd generation shown)

Step 29:

Ensure to align the lift ring in accordance with AMAT's recommendation using the Degas Chamber Lift Ring Alignment Fixture (See Fig 54 & 55)


		Fig 54 & 55: Aligning to Degas Heater lift ring using AMAT's alignment fixture (1st & 3rd generation shown)

Step 30:	When the lift ring has been properly reinstalled into the Degas Chamber, perform a final wipe using an IPA saturated MiraWIPE^®

		1. Make sure to wipe all pump ports, slit valves and o-ring surfaces
		2. Wipe the top reflector plate with a freshly IPA saturated MiraWIPE^®

Step 31:	Close Degas Chamber and bring it back to production using AMAT's recommended recovery procedure


	COMPLETED DEGAS CHAMBER SCRUB