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| BEFORE | AFTER | |
| Vacuum Chamber PM Technique | ||
| AMAT ENDURA™ CVD / PVD Lid Clean | ||
| OBJECTIVE: | ||
| TO EFFECTIVELY PM THE AMAT ENDURATM CVD / PVD LID IN A TIMELY MANNER, WHILE IMPROVING TOOL RECOVERY, PARTICLE PERFORMANCE AND REDUCING HAZARDOUS WASTE | ||
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| Vacuum Chamber: | AMAT ENDURA CVD/ PVD | |
| Vacuum Chamber Process Residue: | TiN DEPOSITION | |
| Vacuum Chamber Components: | LID |
| Old Procedure: | SiC scrubbing pads and wipes | |
| Solvent | DI water, IPA (only) | |
| Vacuum Chamber Products: | ||
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| AMAT ENDURA™ CVD/ PVD Lid CLEAN PM Procedure: | ||||||
| View “How to” instructional videos on http://www.foamtecintlwcc.com/video/ | ||||||
| Step 1: | Using all safety procedures and guidelines, remove the parts that are required to be removed from within the tool to complete the PM | |||||
| Step 2: | Effectively place HT9423 Cushion Pad underneath lid to soak up any excess DI water (See Fig 1) | |||||
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Fig 1: TiN deposition ring |
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| Step 3: | Insert HT6638 Pipe Plugs into holes on the perimeter of the lid. This will stop DI water leaking in the holes (See Fig 2) | |||||
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Fig 2: Place plug pipes in holes |
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| Step 4: | Dampen the HT4754 UltraSOLV® Sponge and effectively wipe the inside of the lid, to remove excess deposition | |||
| Step 5: | Using a DI water dampened HT4536D-10, 360 Grit Diamond ScrubPAD scrub an approximately 6”x6” area within the lid. Scrub this area until deposition is effectively removed | |||
| Step 6: | Wipe-down the affected chamber area using the DI water dampened HT4754 UltraSOLV® sponge | |||
| Step 7: | As necessary, unload the ScrubPADS of deposition by wiping the ScrubPADS with HT4754 UltraSOLV® Sponge in one direction (See Fig 3, 4 & 5) |
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Fig 3: ScrubPAD loaded with deposition |
Fig 4: Pull ScrubPAD across UltraSOLV® Sponge |
Fig 5: Unloaded ScrubPAD
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| Step 8: | Unload the HT4754 UltraSOLV® Sponge by moistening with DI water and ringing out into a properly labeled HazMat container (See Fig 6 & 7) | ||
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Fig 5: Loaded-up UltraSOLV® Sponge |
Fig 6: UltraSOLV® Sponge AFTER rinse |
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| Step 9: | Using the HT4536D-10, 360 Grit Diamond ScrubPAD and the HT4754 UltraSOLV® sponge, continue to remove deposition from affected area of the lid. Using the same method as described above | ||
| Step 10: | In order to remove deposition from the remaining hard to reach areas, (such as the o-ring grooves and holes) use the HT174980D 800 Grit Diamond ScrubTIP® to effectively reach these areas. Unload the ScrubTIP® as necessary, using the same method as described above to unload the ScrubPADS | ||
| Step 11: | For the flatter surfaces, apply the HT4580DC3-1 800 Grit Diamond ScrubDISK®, or the HT4513PDC3-1 1350 Grit Diamond ScrubDISK® to the FT901 ErgoSCRUB®. Dampen ScrubDISK® with DI water and scrub affected area. Unload excess deposition from the ScrubDISK®, using the same method as the ScrubPADS described above (See Fig 8) | ||
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Fig 8: For a more polished finish use the higher grit size. 1350 grit on right and 800 grit on left. |
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| Step 12: | Using IPA dampen the HT1702-5 swabs and wipe o-ring grove, until all deposition is removed. Also use HT1702-5 to remove any process residue in the plug holes (See Fig 9) | ||
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Fig 9: Using swabs to remove residue in plug holes |
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| FINAL WIPE PROCEDURE: | ||||||
| IMPORTANT NOTE | ||||||
| THIS IMPORTANT STEP MUST BE EFFECTIVELY FOLLOWED IN ORDER TO ACHIEVE THE MAXIMUM EFFICIENCY OF TOOL RECOVERY AND PERFORMANCE. CONTINUE TO WIPE ALL OF THE AFFECTED PM AREAS WITHIN THE AMAT ENDURA LID REPEATEDLY, UNTIL ALL MiraWIPES® HAVE BEEN USED AND NO DEPOSITION IS SEEN ON THE WIPES | ||||||
Figure below shows how much more deposition the Foamtec International MiraWIPE® can remove from a critical surface compared to the standard fab wiper, making the MiraWIPE® FINAL WIPE PROCEDURE the most CRITICAL STEP of the PM procedure (See Fig 10a & 10b) |
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Fig 10a: Current fab wiper after completely wiping AMAT Endura Lid |
Fig 10b: Particles picked up using HT5790S MiraWIPES® after completely wiping with current fab wiper |
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MiraWIPES® are the KEY STEP for DEFECT REDUCTION and IMPROVED TOOL RECOVERY |
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| Step 14: | For added efficiency, ensure to wipe down all spare parts to be placed back on to the AMAT Endura using IPA dampened HT5790S MiraWIPES® |
