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| Vacuum Chamber PM Technique |
| AMAT ETCHERS |
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OBJECTIVE: |
| TO EFFECTIVELY PM THE AMAT ETCH IN A TIMELY MANNER, WHILE HELPING TO MINIMIZE PARTICLE ISSUES, IMPROVE TOOL PERFORMANCE AND REDUCE HAZARDOUS WASTE |
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Vacuum Chamber: |
AMAT ETCHERS |
| Vacuum Chamber Process Residue: |
ER ON ESC AND OXIDE RESIDUES ON CHAMBER WALL |
| Vacuum Chamber Components: |
CHAMBER, COMPONENTS SURFACES |
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Old Procedure: |
Standard clean room polyester wipers and Scotch-Brite™ |
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Solvent: |
DI water, IPA |
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Vacuum Chamber Products: |
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- (2) HT4532A-10 320 Grit UltraSOLV® ScrubPAD
- (1) HT4540-10 400 Grit UltraSOLV® ScrubPAD
- (1) HT4580A-10 800 Grit UltraSOLV® ScrubPAD
- (2) HT4520PA-10 2000 Grit UltraSOLV® ScrubPAD
- (1) HT4754 UltraSOLV® Sponge
- (4) HT4790-5 UltraSOLV® Wipers
- (1) HT173228D Diamond ScrubTIP®
- (1) HT1732-50 UltraSOLV® Swabs
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| NOTE: INITIAL CLEAN MAY REQUIRE THE USE OF ADDITIONAL PRODUCTS TO EFFECTIVELY CLEAN CHAMBER BACK TO BARE METAL |
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| RECOMMEND: PERFORM A ROUND OF 2-3 PM'S ON SAME TOOL TO ESTABLISH SUFFICIENT DATA FOR EVALUATION |
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| AMAT ETCH PM Procedure: |
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| View “How to” instructional videos at http://www.foamtecintlwcc.com/video/ |
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| Step 1: |
Initial Clean - Use 3-4 four-folded DI/IPA saturated wipers to thoroughly wet and remove build-up from surface and subsurface of chamber and components. Dampen four-fold wipers using a squeeze bottle; dispense ¼ to ½ teaspoon of DI/IPA solution in a thin line across the area just behind the fold |
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| Step 2: |
For the best results, allow poly build-up to cool until slightly hardened. Use DI/IPA dampened HT4532A-10 UltraSOLV® ScrubPAD to remove the top surface of the build-up. Dampen UltraSOLV® ScrubPAD with a squeeze bottle |
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| Step 3: |
To clear ScrubPAD of sludge, wipe lightly, in one direction, with an HT4754 UltraSOLV® Sponge (See Fig 1, 2 & 3) |
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Fig 1 : ScrubPAD loaded with deposition |
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Fig 2 : Pull ScrubPAD across UltraSOLV® Sponge |
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Fig 3: Unloaded ScrubPAD |
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| Step 4: |
Unload the UltraSOLV® HT4754 Sponge by rinsing out with DI water and ringing out into a HazMat container. (See Fig 4 & 5) |
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Fig 4: Loaded-up UltraSOLV® Sponge |
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Fig 5: UltraSOLV® Sponge AFTER rinse |
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| Step 5: |
Cover the ESC to prevent scratching. Lightly scrub the upper ceramic areas with the HT4540A-10 UltraSOLV® ScrubPAD to remove residue. Occasionally wipe scrubbed areas with HT4754 UltraSOLV® Sponge to remove loosened residue. The same sponge can also be used to “unload” the ScrubPAD for maximum effectiveness. (See steps 3 & 4) |
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| Step 6: |
Move the pedestal to process position to access areas below and around the ESC. Using a fresh UltraSOLV® ScrubPAD, lightly scrub the vertical walls of the pedestal to remove excess residue. As build-up is loosened, follow with Sponge wipe for maximum effectiveness. Remember to unload the UltraSOLV® ScrubPAD frequently to increase cleaning efficiency (See steps 3 & 4) Repeat above for remaining pedestal areas |
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| NOTE: |
For pedestal walls with extremely hard residue, it is recommended to use an HT4580D-10, 800 Grit Diamond UltraSOLV® ScrubPAD. For hard-to-reach areas and small vertical surfaces use an HT174813PD ScrubTIP®. A HT179060 ScrubTIP® should be used to clean vertical surfaces. To final clean these areas use enough HT1748 and HT1790 UltraSOLV® Swabs until no visible contamination transfers off surface to the swabs. |
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| Step 7: |
Use an HT17328D ScrubTIP® to clean areas where the bafflers are fastened to the chamber. HT1732 UltraSOLV® Swabs should be used where residue has been deposited. |
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| Step 8: |
Vacuum the scrubbed areas to ensure final removal of loosened particles |
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| Step 9: |
Finally, wipe down chamber with 25-40 HT4790 UltraSOLV® Wipers and isopropyl alcohol. |
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| NOTE: |
If the baffle and ceramic rings need to be cleaned in place, the following procedure should be used. |
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| Step 10: |
The ceramic focus ring can be cleaned with an HT4536D-10 UltraSOLV® 360 Grit Diamond ScrubPAD. To final clean ceramic, wipe with HT4790 UltraSOLV® Wipers until all residue is removed. |
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| Step 11: |
The baffle is easily cleaned with HT174813PD ScrubTIPS®. The ScrubTIPS® are also effective at cleaning loose residues from the tight spaces in the “fan sector” area. Remember to clean both sides of the baffle with a fresh UltraSOLV® ScrubPAD. |
Scotch-Brite™ is a trademark of 3M Corporation
