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Vacuum Chamber PM Technique
200MM AMAT HDP Chamber Scrub
OBJECTIVE:
TO PM THE 200 MM AMAT HDP CHAMBER IN AN EFFECTIVE AND TIMELY MANNER, WHILE IMPROVING TOOL RECOVERY AND PARTICLE PERFORMANCE

	Vacuum Chamber:	200 MM AMAT HDP DOME
	Vacuum Chamber Process Residue:	FILM FROM HDP/CVD RESIDUE
	Vacuum Chamber Components:	CHAMBER WALLS

	Old Procedure:	Scotch-Brite™ with DI water
	New Procedure:	Foamtec Products, DI water & Final Wipe – MiraWIPE® W/IPA (DI water optional)

	Vacuum Chamber Products:
			(1) HT4754 UltraSOLV® Sponge
			(1) HT4536H-10-1 360 Grit Diamond ScrubPAD
			(1) HT4513PH-10-1 1350 Grit Diamond ScrubPAD
			(1) HT5790S-25 MiraWIPES®

NOTE:	FIRST CLEAN MAY REQUIRE THE USE OF MORE PRODUCTS DUE TO THE CURRENT CONDITION OF THE HDP CHAMBER
200 MM AMAT HDP Chamber PM Procedure:
View “How to” instructional videos on http:www.foamtecintlwcc.com/video/
Step 1:	Using all safety procedures and guidelines, prepare AMAT 5200 Centura HDP Tool for chamber scrub
Step 2:	Properly stage Foamtec Products for chamber scrub with HazMat bag readily available
Step 3:	Moisten the HT4754 UltraSOLV® Sponge with DI water and proceed to wipe out entire chamber. This will remove any flakes or loose deposition from chamber surface

Step 4:	Moisten the HT4536D 360 Grit Diamond ScrubPAD with DI water and proceed to scrub a 6” X 6” area within the HDP chamber surface
Step 5:	Moisten the HT4754 UltraSOLV® Sponge with DI water and wipe-out the deposition from the area scrubbed in “step 4”
Step 6:	Unload the 360 Grit Diamond ScrubPAD as needed by wiping onto the HT4754 UltraSOLV® Sponge in ONE direction (See Fig 1, 2 & 3)

Fig 1: ScrubPAD loaded with deposition

Fig 2: Pull ScrubPAD across UltraSOLV® Sponge

Fig 3: Unloaded ScrubPAD

Step 7:	Return HT4754 UltraSOLV® Sponge to container of DI water and re-moisten the 360 Grit Diamond ScrubPAD with DI water. Diamond ScrubPAD and UltraSOLV® Sponge will remain in good condition throughout entire clean (See Fig 4 & 5)

	Fig 4: Loaded-up UltraSOLV® Sponge			Fig 5: UltraSOLV® Sponge AFTER rinse

Step 8:	Repeat steps 4 through 7 until entire chamber has been effectively cleaned. 360 Grit Diamond ScrubPAD will be more effective if kept slightly moist with DI water
Step 9:	When entire chamber scrub is completed with 360 Grit Diamond ScrubPAD, moisten 1350 Grit Diamond ScrubPAD

Step 10:	Perform a Final Chamber Polish using the 1350 Grit Diamond ScrubPAD in the same manner as the 360 Grit Diamond ScrubPAD was used
NOTE:	Ensure to keep the 1350 Diamond ScrubPAD slightly moist and continue to effectively wipe all parts of the chamber with the HT4754 UltraSOLV® Sponge during the Final Polish
Step 11:	After all areas within the chamber are effectively polished take a freshly rinsed out HT4754 UltraSOLV® Sponge and wipe-out chamber again preparing for FINAL WIPE PROCEDURE

FINAL WIPE PROCEDURE:
IMPORTANT NOTE
THE USE OF HT5790S MiraWIPES® DURING FINAL WIPE PORTION OF PROCEDURE IS A CRITICAL STEP TO EFFECTIVELY REMOVING PARTICLE DEFECTS FROM THE AMAT HDP
Figure below shows how much more deposition the Foamtec International MiraWIPE® can remove from a critical surface compared to the standard fab wiper, making the MiraWIPE® FINAL WIPE PROCEDURE the most CRITICAL STEP of the PM procedure (See Fig 6a & 6b)
Fig 6a: Current fab wiper after completely wiping the AMAT HDP		Fig 6b: Particles picked up using HT5790S MiraWIPES® after completely wiping with current fab wiper
	MiraWIPES® are the KEY STEP for DEFECT REDUCTION and IMPROVED TOOL RECOVERY

Step 12:	Using 100% IPA (DI water optional), dampen the HT5790S MiraWIPES® and perform a THOROUGH AND EFFECTIVELY WIPEDOWN of the HDP Chamber
Step 13:	Ensure to wipe down all o-ring grooves, pump ports, slit valves and spare parts placed back into the HDP Chamber using additional HT5790S MiraWIPES®

Scotch-Brite™ is a trademark of 3M Corporation

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