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| BEFORE | AFTER | |
| Vacuum Chamber PM Technique | ||
| Axcelis GSD Ion Source Clean | ||
| OBJECTIVE: | ||
TO EFFECTIVELY PM THE GSD RESOLVING HOUSING IN A TIMELY MANNER, WHILE IMPROVING TOOL RECOVERY, PARTICLE PERFORMANCE, ELIMINATING THE USE OF H2O2, AND REDUCING HAZARDOUS WASTE |
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| Vacuum Chamber: | AXCELIS GSD 200E ION IMPLANTER | |
| Vacuum Chamber Process Residue: | PROCESS INDUCED RESIDUE | |
| Vacuum Chamber Components: | ION SOURCE |
| Old Procedure: | H2O2, Scotch-Brite™, DI water, wipers and IPA | |
| New Procedure: | Foamtec Products, DI water, MiraWIPES® and IPA | |
| DANGER: | ||
| USE OF HYDROGEN PEROXIDE (H2O2) CAUSES A VARIETY OF ENVIRONMENTAL, HEALTH, AND SAFETY CONCERNS. CAN CAUSE PROLONGED PUMP DOWN TIMES AND HIGH VOLTAGE ARCING. BREATHING APPARATUS AND FULL ACID PPE IS RECOMMENDED WHILE SCRUBBING WITH H2O2. SCRUBBING PHOSPHORUS WHILE USING H2O2 INCREASES THE RISK OF FIRES AND/OR THE RELEASE OF HAZARDOUS CHEMICAL FUMES, POTENTIALLY RESULTING IN PERSONAL INJURY AND PROPERTY DAMAGE.. | ||
| Vacuum Chamber Products: | ||||
| (1) HT4754 UltraSOLV® Sponge | ||||
| (1) HT4536D-10-1 360 Grit Diamond ScrubPAD | ||||
| (1) HT4536DC3-1 360 Grit Diamond ScrubDISK® | ||||
| (1) FT901 ErgoSCRUB® | ||||
| (1) HT5790S-25 MiraWIPES® | ||||
| Axcelis GSD 200E Resolving Housing Clean PM Procedure: | ||||||
| View “How to” instructional videos on http://www.foamtecintlwcc.com/video/ | ||||||
| NOTE: | Initial clean may require the use of additional products to effectively clean chamber back to bare metal | |||||
| Step 1: | Using proper procedures and safety guidelines properly shutdown, vent and remove all source parts from source chamber | |||||
| Step 2: | Place HT4754 UltraSOLV® Sponge, 360 Grit Diamond ScrubPAD and 360 Grit Diamond ScrubDISK® into container with approximately 1 liter of DI water (See Fig 1) | |||||
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Fig 1: ScrubPAD, ScrubDISK® & sponge in 1-liter DI water
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| Step 3: | Vacuum inside of the source chamber using an approved arsenic vacuum system | |||||
| Step 4: | Using the dampened UltraSOLV® Sponge, wipe down all areas throughout source chamber | |||
| NOTE: | Continue to re-soak and dampen the UltraSOLV® Sponge as necessary | |||
| Step 5: | Attach dampened 360 Grit Diamond ScrubDISK® to ErgoSCRUB® (See Fig 2 above) | |||
| Step 6: | With UltraSOLV® Sponge, dampen a 6” to 8” scrubbing area within the source chamber | |||
| Step 7: | Using 360 Grit Diamond ScrubDISK® and ErgoSCRUB® scrub deposition from moistened area within source chamber |
| Step 8: | Remove the deposition from the scrubbed area by wiping with the UltraSOLV® Sponge |
| Step 9: | To un-load ScrubDISK® of deposition, place the ScrubDISK® onto the dampened UltraSOLV® Sponge and pull across in one direction (See Fig 2, 3 & 4) |
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Fig 2: ScrubPAD loaded with deposition |
Fig 3: Pull ScrubPAD across UltraSOLV® Sponge |
Fig 4: Unloaded ScrubPAD
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| Step 10: | To un-load UltraSOLV® Sponge return back to container of DI water to rinse (See Fig 5 & 6) |
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Fig 5: Loaded-up UltraSOLV® Sponge |
Fig 6: UltraSOLV® Sponge AFTER rinse |
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| Step 11: | Continue to repeat process throughout entire chamber using ScrubDISK® with ErgoSCRUB®. Use 360 Grit Diamond ScrubPAD for remaining areas that cannot be reached with ErgoSCRUB®, unloading ScrubPAD on UltraSOLV® Sponge as necessary | ||
| Step 12: | Continue to repeat process throughout entire chamber until all deposition is removed. It is important to keep the ScrubPAD and chamber moist with DI water during clean | ||
| Step 13: | After all areas within entire chamber have been effectively cleaned, rinse out UltraSOLV® Sponge and thoroughly wipe out resolving housing as you prep the process chamber for FINAL WIPE PROCEDURE | ||
| FINAL WIPE PROCEDURE: | ||
IMPORTANT NOTE |
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| THIS IMPORTANT STEP MUST BE EFFECTIVELY FOLLOWED IN ORDER TO ACHIEVE THE MAXIMUM EFFICIENCY OF TOOL RECOVERY AND PERFORMANCE. CONTINUE TO WIPE ALL OF THE AFFECTED PM AREAS WITHIN THE IMPLANT GSD 200E SOURCE CHAMBER REPEATEDLY, UNTIL ALL MiraWIPES® HAVE BEEN USED AND NO DEPOSITION IS SEEN ON THE WIPES | ||
Figure below shows how much more deposition the Foamtec International MiraWIPE® can remove from a critical surface compared to the standard fab wiper, making the MiraWIPE® FINAL WIPE PROCEDURE the most CRITICAL STEP of the PM procedure (See Fig 7a & 7b) |
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Fig 7a: Current fab wiper after completely wiping Axcelis Ion Source Chamber |
Fig 7b: Particles picked up using HT5790S MiraWIPES® after completely wiping with current fab wiper |
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MiraWIPES® are the KEY STEP for DEFECT REDUCTION and IMPROVED TOOL RECOVERY |
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| Step 14: | Dampen the HT5790S MiraWIPES® with IPA and perform a THOROUGH AND EFFECTIVE FINAL WIPE-DOWN of the entire source chamber – including o-ring grooves and all sealing surfaces |
| Step 15: | Ensure to wipe down all shields and spare parts placed back into the Axcelis GSD Source using additional IPA dampened HT5790S MiraWIPES® |
Scotch-Brite™ is a trademark of 3M Corporation
