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| BEFORE |
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AFTER |
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| Vacuum Chamber PM Technique |
| Axcelis GSD 200E Resolving Housing Clean |
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| OBJECTIVE: |
| TO EFFECTIVELY PM THE GSD RESOLVING HOUSING IN A TIMELY MANNER, WHILE IMPROVING TOOL RECOVERY AND PARTICLE PERFORMANCE, ELIMINATING THE USE OF H2O2, AND REDUCING HAZARDOUS WASTE |
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Vacuum Chamber: |
AXCELIS GSD 200E ION IMPLANTER |
| Vacuum Chamber Process Residue: |
PROCESS INDUCED RESIDUE |
| Vacuum Chamber Components: |
RESOLVING HOUSING |
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Old Procedure: |
H2O2, Scotch-Brite™, DI water, wipers and IPA |
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New Procedure: |
Foamtec Products, DI water, MiraWIPES® and IPA |
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| DANGER: |
| USE OF HYDROGEN PEROXIDE (H2O2) CAUSES A VARIETY OF ENVIRONMENTAL, HEALTH, AND SAFETY CONCERNS. CAN CAUSE PROLONGED PUMP DOWN TIMES AND HIGH VOLTAGE ARCING. BREATHING APPARATUS AND FULL ACID PPE IS RECOMMENDED WHILE SCRUBBING WITH H2O2. SCRUBBING PHOSPHORUS WHILE USING H2O2 INCREASES THE RISK OF FIRES AND/OR THE RELEASE OF HAZARDOUS CHEMICAL FUMES, POTENTIALLY RESULTING IN PERSONAL INJURY AND PROPERTY DAMAGE.. |
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Vacuum Chamber Products: |
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(1) HT4754 UltraSOLV® Sponge |
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(1) HT4536D-10-1 360 Grit Diamond ScrubPAD |
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(1) HT5790S-25 MiraWIPES® |
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| Axcelis GSD 200E Resolving Housing Clean PM Procedure: |
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| View “How to” instructional videos on http://www.foamtecintlwcc.com/video/ |
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| NOTE: |
Initial clean may require the use of additional products to effectively clean chamber back to bare metal |
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| Step 1: |
Using proper procedures and safety guidelines, properly shutdown, vent and remove all required parts from resolving housing |
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| Step 2: |
Place HT4754 UltraSOLV® Sponge, 360 Grit Diamond ScrubPAD into container with approximately 1 liter of DI water (See Fig 1) |
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Fig 1: ScrubPAD, ScrubDISK® & sponge in 1-liter DI water
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| Step 3: |
Vacuum the bottom of the resolving housing to remove excess flakes using an approved arsenic vacuum system |
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| Step 4: |
Using the dampened UltraSOLV® Sponge, proceed to wipe down all areas throughout resolving housing |
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| NOTE: |
CONTINUE TO RE-SOAK AND DAMPEN THE ULTRASOLV® SPONGE AS NECESSARY |
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| Step 5: |
With UltraSOLV® Sponge, dampen a 6” to 8” scrubbing area within the resolving housing |
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| Step 6: |
Using 360 Grit Diamond ScrubPAD proceed to scrub deposition from moistened area within resolving housing |
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| Step 7: |
Remove the deposition from the scrubbed area by wiping with the UltraSOLV® Sponge |
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| Step 8: |
To un-load ScrubPAD of deposition, place the ScrubPAD onto the dampened UltraSOLV® Sponge and pull across in one direction (See Fig 2, 3 & 4) |
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Fig 2: ScrubPAD loaded with deposition |
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Fig 3: Pull ScrubPAD across UltraSOLV® Sponge |
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Fig 4: Unloaded ScrubPAD
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| Step 9: |
To un-load UltraSOLV® Sponge return back to container of DI water to rinse (See Fig 5 & 6) |
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Fig 5: Loaded-up UltraSOLV® Sponge |
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Fig 6: UltraSOLV® Sponge AFTER rinse |
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| Step 10: |
Continue to repeat process throughout entire resolving housing using 360 Grit Diamond ScrubPAD, unload ScrubPAD on UltraSOLV® Sponge as necessary |
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| Step 11: |
Continue to repeat process throughout entire resolving housing until all deposition is removed |
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| NOTE: |
IT IS IMPORTANT TO KEEP THE SCRUBPAD MOIST WITH DI WATER DURING CLEAN |
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| Step 12: |
After all areas within entire chamber have been effectively cleaned, rinse out UltraSOLV® Sponge and thoroughly wipe out resolving housing as you prep the process chamber for FINAL WIPE PROCEDURE |
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| FINAL WIPE PROCEDURE: |
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IMPORTANT NOTE |
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| THE USE OF HT5790S MiraWIPES® DURING FINAL WIPE PORTION OF PROCEDURE IS A CRITICAL STEP TO EFFECTIVELY REMOVING PARTICLE DEFECTS FROM THE AXCELIS GSD RESOLVING HOUSING |
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Figure below shows how much more deposition the Foamtec International MiraWIPE® can remove from a critical surface compared to the standard fab wiper, making the MiraWIPE® FINAL WIPE PROCEDURE the most CRITICAL STEP of the PM procedure (See Fig 7a & 7b) |
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Fig 7a: Current fab wiper after completely wiping Axcelis Resolving Housing |
Fig 7b: Particles picked up using HT5790S MiraWIPES ® after completely wiping with current fab wiper |
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| Step 13: |
Dampen the HT5790S MiraWIPES® with IPA and perform a THOROUGH AND EFFECTIVE FINAL WIPE-DOWN of the entire resolving housing, including o-ring grooves and all sealing surfaces |
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| Step 14: |
Ensure to wipe down all spare parts placed back into the Axcelis GSD Resolving Housing using additional IPA dampened HT5790S MiraWIPES® |
Scotch-Brite™ is a trademark of 3M Corporation
