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| Vacuum Chamber PM Technique | |
| Davidson Wilder (DW) Industrial | |
| Optics Coater Chamber | |
| OBJECTIVE: | |
| TO EFFECTIVELY REMOVE THE COATING FROM THE DW COATER CHAMBER IN A TIMELY MANNER WHILE IMPROVING CLEANLINESS IN THE CHAMBER | |
| Vacuum Chamber: | DAVIDSON WILDER INDUSTRIAL OPTICAL COATER | |
| Vacuum Chamber Process Residue: | OPTICAL COATING FILMS | |
| Vacuum Chamber Components: | VACUUM CHAMBER |
| Old Procedure: | Scotch-Brite™ and wire brush | |
| New Procedure: | Diamond ScrubPAD, ScrubDISK®, UltraSOLV® Sponge, and MiraWIPES® | |
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| Vacuum Chamber Products: | ||||
| (1) HT4536D-10-1 360 Grit Diamond ScrubPAD | ||||
| (1) HT4518DC3-1 180 Grit Diamond ScrubDISK® | ||||
| (1) FT951 ErgoSCRUB® Handle | ||||
| (1) HT4754 UltraSOLV® Sponge | ||||
| (2) HT5790S-5 MiraWIPES® (10 MiraWIPES®) | ||||
| DW Optics Coater Chamber PM Procedure: | ||||||
| View “How to” instructional videos on http://www.foamtecintlwcc.com/video/ | ||||||
| Step 1: | Using proper procedures and safety guidelines prepare DW Coater Chamber for clean | |||||
| Step 2: | Stage a small amount of DI water next to the chamber and place the HT4754 UltraSOLV® Sponge, and HT4536D 360 Grit Diamond ScrubPAD in the container (See Fig 1) | |||||
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Fig 1: UltraSOLV® Sponge and ScrubPAD into container of DI water |
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| Step 3: | Place the HT4518DC3 Diamond ScrubDISK® onto the FT951 ErgoSCRUB® Handle. Dip the Diamond ScrubDISK® into the water and shake off excess (See Fig 2) | |||||
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Fig 2: Diamond ScrubDISK® attached to handle |
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| NOTE: | Minimize the amount of DI water into the coater chamber. Just enough is needed to keep the ScrubDISK® lubricated | |||
| Step 4: | Scrub areas in the coater chamber bottom where there is deposition or overspray (See Fig 3) | |||
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Fig 3: Scrub along the bottom of the chamber where there is overspray |
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| Step 5: | Once a small area is scrubbed wipe residue off with the LIGHTLY dampened UltraSOLV® Sponge before it dries back onto the chamber wall surface (See Fig 4) | |||
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Fig 4: Wipe residue with sponge before it dries onto the surface |
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| Step 6: | Continue scrubbing and wiping the other areas of the chamber (See Fig 5 & 6) | ||||
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Fig 5: Scrub the back walls where shielding does not cover |
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Fig 6: Scrub the door where shielding does not cover |
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| Step 7: | As ScrubDISK® begins to load up with deposition, pull across dampened UltraSOLV® Sponge to unload ScrubPAD (See Fig 7, 8 & 9) | ||||
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Fig 7: ScrubPAD loaded with deposition |
Fig 8: Pull ScrubPAD across UltraSOLV® Sponge |
Fig 9: Unloaded ScrubPAD
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| Step 8: | Rinse the UltraSOLV® Sponge with DI water as sponge begins to load up with deposition (See Fig 10 & 11) | ||
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Fig 10: Loaded-up UltraSOLV® Sponge |
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Fig 11: UltraSOLV® Sponge AFTER rinse |
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| Step 9: | Continue to perform steps 3 through 8 until the coater chamber has been scrubbed ensuring to rinse UltraSOLV® Sponge and unload 180 Grit Diamond ScrubPAD as necessary | ||
| Step 10: | Take the HT4536D 360 Grit Diamond ScrubPAD from the DI water and wring out the excess | ||
| Step 11: | Use the 360 Grit Diamond ScrubPAD to clean the copper crucible heater block (See Fig 12) | ||
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Fig 12: Clean crucible heater with 360 Grit Diamond ScrubPAD
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| Step 12: | Use a vacuum to clean up any flakes left in the coater chamber | ||
| FINAL WIPE PROCEDURE: | ||
IMPORTANT NOTE |
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| THE USE OF HT5790S MiraWIPES® DURING FINAL WIPE PORTION OF PROCEDURE IS A CRITICAL STEP TO EFFECTIVELY REMOVING PARTICLE DEFECTS FROM COATER CHAMBER | ||
Figure below shows how much more deposition the Foamtec International MiraWIPE® can remove from a critical surface compared to the standard fab wiper, making the MiraWIPE® FINAL WIPE PROCEDURE the most CRITICAL STEP of the PM procedure (See Fig 13a & 13b) |
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Fig 13a: Current fab wiper after completely wiping chamber |
Fig 13b: Particles picked up using HT5790S MiraWIPES® after completely wiping with current fab wiper |
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MiraWIPES® are the KEY STEP for DEFECT REDUCTION and IMPROVED TOOL RECOVERY |
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| Step 13: | Replace the used MiraWIPE® with a fresh MiraWIPE® as necessary, and continue wiping coater chamber until MiraWIPE® no longer is able to remove residue from chamber |
| Step 14: | Follow procedures to re-line the chamber and bring it back into production |
Scotch-Brite™ is a trademark of 3M Corporation
