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BEFORE AFTER
Vacuum Chamber PM Technique
Eaton NV10-160 Source Chamber
OBJECTIVE:

TO EFFECTIVELY PM THE EATON NV10-160 SOURCE CHAMBER IN A TIMELY MANNER, WHILE SHOWING A REDUCTION IN COST/PM USING A SUPERIOR PM TECHNIQUE
: 
Vacuum Chamber: EATON  NV10-160
Vacuum Chamber Process Residue: SB & ASH3 BEAM DEPOSITION
Vacuum Chamber Components: SOURCE CHAMBER
Old Procedure:

30 minutes using Scotch-Brite™, metal file, DI water, 100+ wipes
Recovery time: 4 to 6 Hours

 
New Procedure:

15 minutes using Foamtec International’s products with DI water
Recovery time: 1 to 2 Hours

Vacuum Chamber Products:
Eaton NV10-160 Source PM Kit
PM Kit P/N:  HT4500 – NV160
  • (1) HT4522D-10-1 220 Grit Diamond ScrubPAD
  • (1) HT4754 UltraSOLV® Sponge
  • (1) HT5790S-5 MiraWIPE® Wipers
  • (1) FT1301 Pail, 1gal (Not included in PM Kit)
 Foamtec products

NOTE:  INITIAL CLEAN MAY REQUIRE THE USE OF ADDITIONAL PRODUCTS TO EFFECTIVELY CLEAN CHAMBER BACK TO BARE METAL

RECOMMEND:  PERFORM A ROUND OF 2-3 PM’S ON SAME TOOL TO ESTABLISH SUFFICIENT DATA FOR EVALUATION

 
Eaton NV10-160 Source Chamber Clean PM Procedure:
View “How to” instructional videos on http://www.foamtecintlwcc.com/video/
Step 1: Using proper procedures and safety guidelines prepare Eaton NV10-160 Source Chamber for wet clean
Step 2: Using an approved house vacuum, vacuum out the source chamber to remove excessive flakes prior to performing wet clean
 
Step 3: Fill the FT1301 container 1/3 full of DI water and stage next to source chamber (See Fig 1)
 
ScrubPAD, UltraSOLV Sponge, and pail
Fig 1: Foamtec International products staged for source chamber clean
Step 4: Place HT4754 UltraSOLV® Sponge and 220 Grit Diamond ScrubPAD in container of DI water to moisten products
 
Step 5: Take dampened UltraSOLV® Sponge and pre-wipe source chamber removing any loose deposition or flakes. Continue to re-moisten the UltraSOLV® Sponge in container of DI water as necessary (See Fig 2)
UltraSOLV Sponge pre-wiping
 
 
Fig 2: Foamtec International UltraSOLV® Sponge pre-wiping source chamber
  
Step 6: Take dampened 220 Grit Diamond ScrubPAD and scrub source chamber free of deposition (See Fig 3)
 
 
Dampen ScrubPAD to scrub chamber
  
 
Fig 3:  Dampen 220 Grit Diamond ScrubPAD and scrub source chamber
  
 
Step 7: As loose deposition begins to build up within the source chamber, take UltraSOLV® Sponge and wipe the area free of deposition (See Fig 4)
 
Sponge wiping loose build-up
 
Fig 4:  UltraSOLV® Sponge used to wipe out loosened deposition
  
 
Step 8: Continue to rinse out sponge in container of DI water as necessary to free UltraSOLV® Sponge of excess deposition
Step 9: As ScrubPAD loads up with deposition, pull across dampened UltraSOLV® Sponge to unload ScrubPAD (See Fig 5, 6 & 7)
ScrubPAD loaded with deposition
Pull ScrubPAD across sponge
Unloaded ScrubPAD
Fig 5: ScrubPAD loaded with deposition
Fig 6: Pull ScrubPAD across UltraSOLV® Sponge
Fig 7: Unloaded ScrubPAD
Step 10: As UltraSOLV® Sponge becomes loaded with deposition, rinse in container of DI water (See Fig 8 & 9)
 
Loaded UltraSOLV Sponge
UltraSOLV after rinse
Fig 8: Loaded-up UltraSOLV® Sponge
Fig 9: UltraSOLV® Sponge AFTER rinse
Step 11: Repeat steps 6 – 10, scrubbing the remaining areas of the source chamber, rinse out UltraSOLV® Sponge and unload 220 Grit Diamond ScrubPAD as necessary
Step 12: When deposition has been removed sufficiently throughout entire source chamber, rinse out UltraSOLV® Sponge with fresh DI water and re-wipe the entire source chamber in preparation for FINAL WIPE PROCEDURE
Step 13: Prior to performing source chamber final wipe, if available, take processed N2 and blow out any moisture that may have accumulated in the tight corners or any of the hard to reach areas throughout the source chamber
FINAL WIPE PROCEDURE:
IMPORTANT NOTE
THE USE OF HT5790S MiraWIPES® DURING THE FINAL WIPE PROCEDURE IS A CRITICAL STEP TO EFFECTIVELY REMOVE PARTICLE DEFECTS FROM CHAMBER
 
Figure below shows how much more deposition the Foamtec International MiraWIPE® can remove from a critical surface compared to the standard fab wiper, making the MiraWIPE® FINAL WIPE PROCEDURE the most CRITICAL STEP of the PM procedure (See Fig 10a & 10b)
MiraWIPES are more effective
Fig 10a: Current fab wiper after completely wiping source chamber
Fig 10b: Particles picked up using HT5790S MiraWIPES® after completely wiping with current fab wiper
MiraWIPES® are the KEY STEP for DEFECT REDUCTION and IMPROVED TOOL RECOVERY
Step 14: Using proper procedures and safety guidelines, return source chamber back to production

Scotch-Brite™ is a trademark of 3M Corporation