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| Application Note | |||
| Genus ALD Chamber | |||
| OBJECTIVE: | |||
TO EFFECTIVELY PM THE GENUS ALD CHAMBER IN A TIMELY MANNER, WHILE IMPROVING TOOL RECOVERY AND PARTICLE PERFORMANCE |
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| Products: | |||
| Genus ALD Chamber Cleaning Procedure: | |||
| View “How to” instructional videos on http://foamtecintlwcc.com/video/ | |||
| Step 1: | Saturate the UltraSOLV® Sponge with DI water and wipe around the chamber walls and electrode. DO NOT USE on graphite susceptor | ||
| Step 2: | Keep UltraSOLV® Sponge clean by rinsing out into hazmat bag | ||
| Step 3: | Remember to use the UltraSOLV® Sponge to keep the UltraSOLV® ScrubPAD clean | ||
| Step 4: | Clean the electrode first. Begin with a 1350 Grit Diamond ScrubPAD moving down to a 360 Grit Diamond ScrubPAD for the outer edge. At the center use a 280 grit. Once finished, go back over the electrode with a 1350 grit to polish. You certainly would not need to go any lower than 280 grit | ||
| Step 5: | On the chamber walls, use a 280 or 360 Grit Diamond ScrubPAD | ||
| Step 6: | On the graphite susceptor, use a 360 Grit Diamond DRY ScrubPAD | ||
| Step 7: | For final wipe, use MiraWIPEs® and UltraSOLV® Swabs until all deposition has been removed | ||
