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| BEFORE |
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AFTER |
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| Vacuum Chamber PM Technique |
| AXCELIS™ GSD 200e Process Chamber Clean |
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| OBJECTIVE: |
| TO PM THE AXCELIS GSD PROCESS CHAMBER IN A TIMELY AND EFFECTIVE MANNER, WHILE IMPROVING PARTICLE PERFORMANCE, TOOL RECOVERY TIME AND MAXIMIZING TOOL UPTIME |
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Vacuum Chamber: |
AXCELIS GSD 200E ION IMPLANTER |
| Vacuum Chamber Process Residue: |
PROCESS INDUCED RESIDUE |
| Vacuum Chamber Components: |
RESOLVING HOUSING |
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Old Procedure: |
H2O2, Scotch-Brite™, DI water, wipers and IPA |
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New Procedure: |
Foamtec Products, DI water, MiraWIPES® and IPA |
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| DANGER: |
| USE OF HYDROGEN PEROXIDE (H2O2) CAUSES A VARIETY OF ENVIRONMENTAL, HEALTH, AND SAFETY CONCERNS. CAN CAUSE PROLONGED PUMP DOWN TIMES AND HIGH VOLTAGE ARCING. BREATHING APPARATUS AND FULL ACID PPE IS RECOMMENDED WHILE SCRUBBING WITH H2O2. SCRUBBING PHOSPHORUS WHILE USING H2O2 INCREASES THE RISK OF FIRES AND/OR THE RELEASE OF HAZARDOUS CHEMICAL FUMES, POTENTIALLY RESULTING IN PERSONAL INJURY AND PROPERTY DAMAGE.. |
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| Axcelis GSD 200E Process Chamber Clean PM Procedure: |
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| View “How to” instructional videos on http://www.foamtecintlwcc.com/video/ |
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| NOTE: |
Initial clean may require the use of additional products to effectively clean chamber back to bare metal |
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| Step 1: |
Using proper procedures and safety guidelines properly shutdown, vent and remove all process chamber parts from chamber |
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| Step 2: |
Place HT4754 UltraSOLV® Sponge, 360 Grit Diamond ScrubPAD and 360 Grit Diamond ScrubDISK® into container with approximately 1 liter of DI water (See Fig 1) |
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Fig 1: Diamond Grit ScrubPAD, ScrubDISK® & Sponge in 1-witer DI water. 360 Grit Diamond ScrubDISK® attached to ErgoSCRUB® |
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| Step 3: |
Vacuum the bottom of the resolving housing to remove excess flakes using an approved arsenic vacuum system |
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| Step 4: |
Using the dampened UltraSOLV® Sponge, proceed to wipe down all areas throughout resolving housing |
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| NOTE: |
CONTINUE TO RE-SOAK AND DAMPEN THE ULTRASOLV® SPONGE AS NECESSARY |
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| Step 5: |
Attach dampened 360 Diamond Grit ScrubDISK® to ErgoSCRUB® (See Fig 1 above) |
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| Step 6: |
With UltraSOLV® Sponge, dampen a 6” to 8” scrubbing area within the source chamber |
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| Step 7: |
Using 360 Diamond ScrubDISK® and ErgoSCRUB® scrub deposition from moistened area within process chamber (See Fig 2) |
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| Step 8: |
Remove the deposition from the scrubbed area by wiping with the UltraSOLV® Sponge (See Fig 3) |
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| Step 9: |
To un-load ScrubDISK® of deposition, place the ScrubDISK® onto the dampened UltraSOLV® Sponge and pull across in one direction (See Fig 4, 5 & 6) |
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Fig 4: Loaded Diamond ScrubDISK® |
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Fig 5: Un-loading technique onto UltraSOLV® Sponge |
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Fig 6: Clean, un-loaded Diamond ScrubDISK®
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| Step 10: |
To un-load UltraSOLV® Sponge return back to container of DI water to rinse (See Fig 7 & 8) |
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Fig 7: Loaded-up UltraSOLV® Sponge |
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Fig 8: UltraSOLV® Sponge AFTER rinse |
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| Step 11: |
Continue to repeat process throughout entire chamber using ScrubDISK® with ErgoSCRUB®. Use 360 Diamond Grit ScrubPAD for remaining areas that cannot be reached with ErgoSCRUB®, unloading ScrubPAD on UltraSOLV® Sponge as necessary |
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| Step 12: |
Continue to repeat process throughout entire process chamber until all deposition is removed. It is important to keep the ScrubPAD and chamber moist with DI water during clean |
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| Step 13: |
Moisten the HT179080D-1 ScrubTIP® with DI water and proceed to remove deposition that has built up on the edges or any areas that cannot be reached by the ScrubPAD |
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| Step 14: |
Unload ScrubTIP® onto UltraSOLV® Sponge as previously described for ScrubDISK® |
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| Step 15: |
After all areas within entire chamber have been effectively cleaned, rinse out UltraSOLV® Sponge and thoroughly wipe out chamber as you prep the process chamber for Final Wipe Procedure |
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| FINAL WIPE PROCEDURE: |
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| Step 16: |
Dampen the HT5790S MiraWIPES® with IPA and perform a THOROUGH AND EFFECTIVE FINAL WIPE-DOWN of the entire process chamber, including o-ring grooves and all sealing surfaces |
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IMPORTANT NOTE |
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| THIS IMPORTANT STEP MUST BE EFFECTIVELY FOLLOWED IN ORDER TO ACHIEVE THE MAXIMUM EFFICIENCY OF TOOL RECOVERY AND PERFORMANCE. CONTINUE TO WIPE-DOWN ALL OF THE AFFECTED PM AREAS WITHIN THE PROCESS CHAMBER REPEATEDLY UNTIL ALL MIRAWIPES® NO LONGER REMOVE ANY MORE DEPOSITION |
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Figure below shows how much more deposition the Foamtec International MiraWIPE® can remove from a critical surface compared to the standard fab wiper, making the MiraWIPE® FINAL WIPE PROCEDURE the most CRITICAL STEP of the PM procedure (See Fig 9a & 9b) |
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Fig 9a: Last standard fab wiper used to wipe out source chamber
SHOWS NO MORE DEPOSITION |
Fig 9b: HT5790S MiraWIPE® used after standard fab wiper. SHOWS MUCH MORE DEPOSITION LEFT IN CHAMBER |
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| Step 17: |
Wipe down all spare parts replaced in the Axcelis™ GSD Process Chamber using additional IPA dampened HT5790S MiraWIPES® |
Scotch-Brite™ is a trademark of 3M Corporation
