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| BEFORE | AFTER | |
| Vacuum Chamber PM Technique | ||
| Implant Axcelis GSD Process Chamber | ||
| OBJECTIVE: | ||
TO PM THE AXCELIS GSD PROCESS CHAMBER IN A TIMELY AND EFFECTIVE MANNER, WHILE IMPROVING PARTICLE PERFORMANCE, TOOL RECOVERY TIME AND MAXIMIZING TOOL UPTIME |
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| Vacuum Chamber: | AXCELIS GSD | |
| Vacuum Chamber Process Residue: | PROCESS INDUCED RESIDUE | |
| Vacuum Chamber Components: | PROCESS CHAMBER |
| Old Procedure: | 6 - 8 hours using Scotch-Brite™, IPA & 250+ wipes | |
| Recovery time: 12+ hours | ||
| New Procedure: | 1.5 hours using FOAMTEC INTERNATIONAL PM KIT with DI water | |
| Recovery time: 6 - 8 Hours | ||
| OVER 10+ HOURS OF TOOL UPTIME IMPROVEMENT | ||
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| Vacuum Chamber Products: | ||||
| AXCELIS GSD PROCESS CHAMBER PM PARTS | ||||
| (1) HT4528DC3-1 280 Grit Diamond ScrubDISK® | ||||
| (1) HT4528D-10-1 280 Grit Diamond ScrubPAD | ||||
| (1) HT4580D-10-1 800 Grit Diamond ScrubPAD | ||||
| (1) FTPEN-1 ScrubWRIGHT™ PEN | ||||
| (1) HT4536DW5-1 360 Grit Diamond ScrubBELT® | ||||
| (1) HT4754 UltraSOLV® Sponge | ||||
| (1) FT901 ErgoSCRUB®, Soft | ||||
| (1) HT1790-5 Foam SWABS (5 Swabs) | ||||
| (1) HT5790S-25 MiraWIPES® (25 MiraWIPES®) | ||||
| Axcelis GSD Process Chamber PM Procedure: | ||||||
| View “How to” instructional videos on http://www.foamtecintlwcc.com/video/ | ||||||
| Step 1: | Using proper procedures and safety guidelines properly prepare Axcelis GSD Process Chamber for wet clean | |||||
| Step 2: | Stage Foamtec International products next to process chamber and have bottle DI water available (See Fig 1) | |||||
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Fig 1: Foamtec International products staged next to process chamber
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| Step 3: | Stage a hazardous material waste bag next to process chamber | |||||
| Step 4: | Attach HT4636DC3-1 280 Diamond Grit ScrubDISK® to FT901 ErgoSCRUB® and over hazardous material waste bag, dampen HT4754 UltraSOLV® Sponge and 280 Grit Diamond ScrubDISK® with DI water (See Fig 2 & 3) | |||
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Fig 2: Dampen UltraSOLV® Sponge with DI water |
Fig 3: Dampen ScrubDISK® with DI water |
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| Step 5: | Take dampened UltraSOLV® Sponge and wipe out process chamber, removing any loose deposition or flakes. Continue to re-moisten the UltraSOLV® Sponge with DI water as necessary | |||||
| Step 6: | Take dampened 280 Grit Diamond ScrubDISK® and scrub areas throughout the Axcelis GSD Process Chamber (See Fig 4) | |||||
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Fig 4: 280 Grit Diamond ScrubDISK® scrubbing process chamber
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| Step 7: | As loose deposition begins to build up within the process chamber, take UltraSOLV® Sponge and wipe the area free of deposition (See Fig 5) | |||||
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Fig 5: UltraSOLV® Sponge used to wipe out loosened deposition |
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| Step 8: | Over hazardous material waste bag, continue to rinse out UltraSOLV® sponge and 280 Grit Diamond ScrubDISK® with DI water to free excess deposition and keep products moist |
| Step 9: | As ScrubDISK® loads up with deposition, pull and twist ScrubDISK® across UltraSOLV® Sponge to unload ScrubDISK® (See Fig 6, 7 & 8) |
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Fig 6: ScrubDISK® loaded with deposition |
Fig 7: Pull and twist ScrubDISK® across UltraSOLV® Sponge |
Fig 8: Unloaded ScrubDISK®
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| Step 10: | Continue to rinse out sponge in container of DI water as necessary to free UltraSOLV® Sponge of excess deposition as necessary (See Fig 9 & 10) | ||
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Fig 9: Loaded-up UltraSOLV® Sponge |
Fig 10: UltraSOLV® Sponge AFTER rinse |
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| Step 11: | Repeat steps 6 - 10, scrubbing the remaining areas of the Axcelis GSD Process Chamber as much as possible. Rinse out UltraSOLV® Sponge and unload 280 Grit Diamond ScrubDISK® as necessary | ||
| Step 12: | Dampen the HT4528D-10-1 280 Grit Diamond ScrubPAD with DI water over the hazardous waste material bag and scrub the remaining areas of the process chamber that you were not able to reach with the 280 Grit Diamond ScrubDISK® and ErgoSCRUB® | ||
| Step 13: | Use the same procedure listed above and unload HT4790 UltraSOLV® Sponge and 280 Grit Diamond ScrubPAD as necessary, and keep products moist with DI water | ||
| Step 14: | After scrubbing entire process chamber, open isolation valve V-3 using proper safety procedures and guidelines | ||
| Step 15: | Using same procedure as above, take 280 Grit Diamond ScrubPAD and scrub remaining areas behind isolation valve V-3 | ||
| Step 16: | Scrub the hard to reach areas and tight corners behind V-3 using the ScrubWRIGHT™ FTPEN-1 with 360 Grit Diamond ScrubBELT® with the same technique described above | ||
| Step 17: | When all areas behind V-3 have been scrubbed, using the same procedure outlined above, take 800 Grit Diamond ScrubPAD and polish the areas behind V-3 | ||
| Step 18: | Using proper safety procedures and guidelines, close isolation valve V-3 |
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| Step 19: | Use the FTPEN-1 with 360 Grit Diamond ScrubBELT® and use the same technique described above to scrub the hard to reach areas and tight corners remaining in process chamber (See Fig 11) | ||
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Fig 11: FTPEN-1 scrubbing edge of V-3 plate
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| Step 20: | After completely scrubbing all areas of Axcelis Process Chamber, including edges and hard to reach areas, take the 800 Grit Diamond ScrubPAD and using the same technique described above, do a quick POLISH of the entire process chamber | ||
| Step 21: | When the Axcelis process chamber has been sufficiently polished, rinse out the UltraSOLV® Sponge with fresh DI water and re-wipe the entire process chamber in preparation for FINAL WIPE PROCEDURE | ||
| FINAL WIPE PROCEDURE: | ||
IMPORTANT NOTE |
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| THE USE OF HT5790S MiraWIPES® DURING FINAL WIPE PORTION OF PROCEDURE IS A CRITICAL STEP TO EFFECTIVELY REMOVING PARTICLE DEFECTS FROM THE AXCELIS GSD PROCESS CHAMBER | ||
Figure below shows how much more deposition the Foamtec International MiraWIPE® can remove from a critical surface compared to the standard fab wiper, making the MiraWIPE® FINAL WIPE PROCEDURE the most CRITICAL STEP of the PM procedure (See Fig 12a & 12b) |
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Fig 12a: Current fab wiper after completely wiping process chamber |
Fig 12b: Particles picked up using HT5790S MiraWIPES® after completely wiping with current fab wiper |
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MiraWIPES® are the KEY STEP for DEFECT REDUCTION and IMPROVED TOOL RECOVERY |
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| Step 22: | Dampen the HT5790S MiraWIPES® with IPA and perform a THOROUGH AND EFFECTIVE FINAL WIPE-DOWN of the entire Axcelis GSD Process Chamber – including o-ring grooves and all vacuum sealing surfaces |
| Step 23: | Wipe down all spare parts placed back into the Axcelis GSD Process Chamber using additional dampened HT5790S MiraWIPES® |
Scotch-Brite™ is a trademark of 3M Corporation
