LAM 9600 Metal ETCH WET-Strip Procedure

Fig 1a: Slit valve door

Fig 1b: Foamtec products: Diamond ScrubPads, Sponge & DI water


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Vacuum Chamber PM Technique
LAM 9600 Metal ETCH WET-Strip Procedure

OBJECTIVE:
TO PM THE LAM 9600 METAL ETCH CHAMBER IN AN EFFECTIVE AND TIMELY MANNER WHILE IMPROVING PARTICLE PERFORMANCE, TOOL RECOVERY AND MAXIMIZING TOOL UPTIME

	Vacuum Chamber:	LAM METAL ETCHER
	Vacuum Chamber Process Residue:	PROCESS INDUCED RESIDUE
	Vacuum Chamber Components:	METAL ETCH CHAMBER, VAT VALVE, CHAMBER LID AND CHAMBER PARTS


	Solvent:	DI WATER, IPA (ONLY)


	Vacuum Chamber Products:
		(1) HT4528D-10 280 Grit Diamond UltraSOLV^® ScrubPAD (1) HT4580D-10 800 Grit Diamond UltraSOLV^® ScrubPAD (2) HT111328D-1 280 Grit Diamond UltraSOLV^® Straight ScrubTIP^® (2) HT111380D-1 800 Grit Diamond UltraSOLV^® Straight ScrubTIP^® (2) HT174913PD-1 1350 Grit Diamond 3” ScrubTIP^® (1) HT4754 UltraSOLV^® Sponge (2) HT1790-5 UltraSOLV^® Swab (2) HT1750-5 UltraSOLV^® Swab (2) HT5790S-25 MiraWIPE^® Wipers

LAM 9600 Metal Etch Wet-Strip PM Procedure:

View “How to” instructional videos on http://www.foamtecintlwcc.com/video/

Step 1:

Using proper procedures and safety guidelines properly shutdown and vent entire Metal ETCH chamber

Step 2:

Reduce ETCH chamber heater settings to 35^oC to 40^oC

Step 3:

Remove slit valve doors and place in container with DI water to soak (See Fig 1a )

Step 4:

Thoroughly moisten all areas within chamber with DI water using HT4754 UltraSOLV^® Sponge; including slit valves, chamber walls, vat valve and chamber lid

Step 5:

Allow Metal ETCH chamber to soak with DI water for one hour

Step 6:

Place HT4754 UltraSOLV^® Sponge, UltraSOLV^® 280 Grit Diamond ScrubPAD and 280 Grit Diamond ScrubTIP^® in container with approximately 1 liter of DI water (See Fig 1b)

Step 7:

Soak and ring out the UltraSOLV^® Sponge and proceed to wipe down all areas throughout Metal ETCH chamber (this will remove flakes and gross buildup). Continue to repeat process until UltraSOLV^® Sponge will no longer remove deposition (See Fig 2)


		Fig 2 : Pre-wipe chamber with UltraSOLV^® Sponge

Step 8:	With UltraSOLV^® Sponge, dampen and moisten a 6” to 8” scrubbing area within the chamber


Step 9:	With dampened UltraSOLV^® 280 Grit Diamond ScrubPAD, scrub off deposition from moistened area (See Fig 3)


		Fig 3 : Scrub off deposition using Diamond ScrubPAD

Step 10:	As deposition begins to release from chamber areas, remove by taking the dampened UltraSOLV^® Sponge and wiping the affected area (See Fig 4)


		Fig 4: Wiping the scrub areas using the UltraSOLV^® Sponge


Step 11:	Continue to repeat process throughout entire chamber until all deposition is removed (see notes for Special Cleaning Tasks)

Step 12:	As UltraSOLV^® ScrubPAD begins to load-up with deposition; it can be cleaned off by dragging across UltraSOLV^® Sponge in one direction (See Fig 5, 6 & 7)

Fig 5: ScrubPAD loaded with deposition

Fig 6: Pull ScrubPAD across UltraSOLV^® Sponge

Fig 7: Unloaded ScrubPAD

Step 13:	As UltraSOLV^® Sponge begins to load-up with deposition; it can be rinsed off and rung-out in container of DI water (See Fig 8)


		Fig 8: Unloading the UltraSOLV^® Sponge with DI water


Step 14:	As water becomes filled with deposition, recommend disposing dirty DI water in appropriate hazardous waste collection tank and replacing with fresh DI water

Step 15:	After all areas within entire chamber have been effectively cleaned, take UltraSOLV^® 800 Grit Diamond ScrubPAD, and using the same technique, proceed to lightly scrub all areas scrubbed previously

NOTE:	Ensure to wipe chamber with a freshly rinsed out UltraSOLV^® Sponge to prep the chamber for FINAL IPA WIPE-DOWN

SPECIAL TASKS (VAT VALVE, TIGHT CORNERS, O-RING GROOVES, MANOMETERS & REMOVABLE PARTS): VAT VALVE:

Recommend cleaning VAT valve after chamber clean, as UltraSOLV^® 280 Grit Diamond ScrubPAD will be softer, more flexible and easier to work with after cleaning ETCH chamber

Step 16:	Take a DI water dampened HT4754 UltraSOLV^® Sponge and proceed to reach into VAT valve from top and bottom to thoroughly wipe out the VAT valve (See Fig 9)


		Fig 9 : Wipe-down VAT valve using UltraSOLV^® Sponge

Step 17:	Using modified extender tool, slide UltraSOLV^® Sponge down into VAT valve to wipe areas not able to reach previously

Step 18:	Using the dampened UltraSOLV^® 280 Grit Diamond ScrubPAD and the modified extender tool, slide the ScrubPAD into the VAT valve to effectively clean down into the valve (See Fig 10)



		Fig 10 : Scrub down into the VAT valve using the Diamond ScrubPAD

NOTE:	Use ScrubPAD after cleaning chamber as pad will soften & be easier to use in VAT valve

Step 19:	Using same technique, wipe the inside of the VAT valve with the HT4754 UltraSOLV^® Sponge

Step 20:	Repeat sequence as necessary to remove as much deposition as possible

Step 21:	In order to clean the tight corners and seals within the VAT valve still not reachable, moisten the 280 Grit Diamond ScrubTIP^® and scrub the affected areas (See Fig 11)


				Fig 11: Clean tight corners and edges using the Diamond ScrubTIP^®

Step 22:

Using the UltraSOLV^® Foam Swabs in the same manner as the UltraSOLV^® Sponge, wipe out the loosened deposition in the tight corners and seals within the VAT valve)

Step 23:

Take UltraSOLV^® 800 Grit Diamond ScrubPAD to perform final scrub and wipe out thoroughly using freshly rinsed UltraSOLV^® Sponge

Step 24:

With fresh MiraWIPES^® and IPA, thoroughly wipe down all areas throughout VAT valve

TIGHT CORNERS, EDGES & O’RING GROOVES:

Step 25:

Dampen the 280 Grit Diamond and 800 Grit Diamond ScrubTIPS^® with DI water and proceed to scrub all hard to reach tight corners and edges (See Fig 12 & 13)


	Fig 12: 280 Grit Diamond ScrubTIP^® cleaning track on bottom of Chamber		Fig 13: Track on bottom of Chamber, left side - Before ScrubTIP^®; right side - After ScrubTIP^®

Step 26:

In all areas the UltraSOLV^® Sponge may not reach, use the UltraSOLV^® Swabs in the same manner as the UltraSOLV^® Sponge and wipe out the loosened deposition in the tight corners and edges

Step 27:

For o-ring grooves, use 1350 Grit Diamond ScrubTIPS^® provided (See Fig 14)


				Fig 14: Use 1350 Grit Diamond ScrubTIPS^® to polish o-ring grooves

Step 28:

Follow o-ring groove with similar size UltraSOLV^® Swabs for wipe-down

Step 29:

With fresh MiraWIPES^® and IPA, thoroughly wipe down all areas throughout tight corners, edges and o-ring grooves effectively as possible

MANOMETERS:

Step 30:

Use dampened 280 Grit Diamond ScrubTIP^® to reach into manometer plumbing and remove buildup within manometer ports (See Fig 15 & 16)

Step 31:

Use UltraSOLV^® Swab to remove loosened deposition from within manometer (See Fig 17)



			Fig 17: Use UltraSOLV^® Foam Swabs to wipe out deposition from manometer ports

Step 32:

With fresh MiraWIPES^® and IPA, thoroughly wipe down all areas throughout manometers

REMOVABLE PARTS (SLIT VALVE DOORS, END PORT & END PORT WINDOW):

Step 33:

On a designated work bench, wipe down parts with DI water dampened UltraSOLV^® Sponge

Step 34:

Use dampened UltraSOLV^® 280 Grit Diamond ScrubPAD to remove deposition buildup on affected areas (See Fig 18 & 19)

Step 35:

Use associated ScrubTIP^® to scrub tight corners, edges and o-ring grooves

Step 36:

Use UltraSOLV^® Sponge and UltraSOLV^® Swabs to remove loosened deposition from associated areas (See Fig 20 & 21)

FINAL WIPE PROCEDURE:

IMPORTANT NOTE

This Portion of the Clean is CRITICAL for an Effective Tool Recovery. As Final IPA Wipe Nears Completion, Use More and More Fresh MiraWIPES^® to Reduce Chances of Introducing Particles Back Into the Chamber

Figure below shows how much more deposition the Foamtec International MiraWIPE^® can remove from a critical surface compared to the standard fab wiper, making the MiraWIPE^® FINAL WIPE PROCEDURE the most CRITICAL STEP of the PM procedure (See Fig 22a & 22b)


Fig 22a: Current fab wiper after completely wiping the LAM 9600		Fig 22b: Particles picked up using HT5790S MiraWIPES^® after completely wiping with current fab wiper


	MiraWIPES^® are the KEY STEP for DEFECT REDUCTION and IMPROVED TOOL RECOVERY


Step 37:	With fresh MiraWIPES^® and IPA, thoroughly wipe down all areas throughout removable parts

Step 38:	Using a single HT5790S MiraWIPE^®, folded into quarters, moisten with IPA (See Fig. 23)


Step 39:	Working from highest point down; proceed to effectively wipe out entire Metal ETCH chamber, refolding MiraWIPE^® to expose fresh side of MiraWIPE^®

Step 40:	Continue to repeat this sequence until entire Metal ETCH chamber is effectively wiped out

TOOL RECOVERY:

Step 41:	Ensure all PM procedures have been completed and checked off to the point of preparation for tool recovery

Step 42:	Just prior to closing chamber lid, effectively wipe out entire chamber one last time using a fresh MiraWIPE^® with IPA (See Fig 24)


		Fig 24: Wipe entire chamber with IPA & MiraWIPES^® just prior to closing chamber lid

Step 43:

Close and seal chamber lid