Novellus INOVA Cool Station Chamber PM Technique

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Vacuum Chamber PM Technique
Novellus INOVA Cool Station Chamber

OBJECTIVE:
TO EFFECTIVELY PM THE NOVELLUS INOVA COOL STATION CHAMBER IN A TIMELY MANNER, WHILE IMPROVING TOOL RECOVERY AND PARTICLE PERFORMANCE

	Vacuum Chamber:	NOVELLUS INOVA COOL STATION
	Vacuum Chamber Process Residue:	PROCESS INDUCED RESIDUE
	Vacuum Chamber Components:	CHAMBER


	Old Procedure:	1 - 2 hours using DI water & IPA with 30+ wipes (Occasionally use Scotch-Brite™) Tool Recovery: Extended out gassing and conditioning wafers to pass particle specs

	New Procedure:	<1 hour using 360D ScrubPAD, UltraSOLV^® Sponge, DI water & IPA w/ MiraWIPES^® & MiraSWABS^® Tool Recovery: IMPROVED TOOL RECOVERY WITH LESS OUT GASSING AND CONDITIONING WAFERS TO PASS PARTICLES


	Vacuum Chamber Products:
	NOVELLUS PVD CHAMBER PM KIT
		(1) HT4536D-10-1 800 Grit Diamond ScrubPAD (1) HT4754 UltraSOLV^® Sponge (2) HT1511FC-5 MiraSWABS^® (10 MiraSWABS^®) (2) HT5790S-5 MiraWIPES^® (10 MiraWIPES^®) (1) HT4790-5 UltraSOLV^® Foam Wipers (5 Foam Wipers)

Novellus Inova Cool Station Chamber PM Procedure:

View “How to” instructional videos on http://foamtecintlwcc.com/video/

Step 1:

Using proper procedures and safety guidelines, shutdown and prepare Novellus INOVA COOL Station chamber for wet clean

Step 2:

Take a certified fab vacuum and vacuum out any loose flaking throughout the cool station chamber

SCRUBBING TOP OF COOL STATION CHAMBER:

NOTE:

IF IT IS NOT NECESSARY TO SCRUB THE TOP EDGE OF THE COOL STATION CHAMBER, THEN PROCEED TO STEP 11 FOR COOL STATION CHAMBER WIPE PROCEDURE (See Fig 1)




			Fig 1: Top edge of cool station chamber; build up may cause vacuum leaks

Step 3:

Take the HT4536D 360 Grit Diamond ScrubPAD and HT4754 UltraSOLV^® Sponge and dampen with DI water (See Fig 2)



	Fig 2: Moisten ScrubPAD and UltraSOLV^® Sponge with DI water

Step 4:

Take lightly dampened UltraSOLV^® Sponge and wipe the top edge of cool station chamber that is to be scrubbed (See Fig 3)




			Fig 3: Moistened UltraSOLV^® Sponge wiping top edge of cool station

Step 5:

Take lightly dampened 360 Grit Diamond ScrubPAD and scrub buildup along the top edge of the cool station chamber (See Fig 4)




	Fig 4: Moist ScrubPAD scrubbing top edge of cool station chamber

NOTE:

FOR BEST RESULTS, SCRUB IN ONE DIRECTION ALONG THE OUTER EDGE OF THE O-RING GROOVE. REMOVE AND REPLACE O-RING IF NEW ONE IS AVAILABLE

NOTE:

REMEMBER IT IS NOT NECESSARY TO USE A LOT OF DI WATER DURING THIS SCRUB PORTION OF THE PM, ONLY ENOUGH TO KEEP DIAMOND SCRUBPAD MOIST

Step 6:

After scrubbing a small area with the 360 Grit Diamond ScrubPAD, take the lightly dampened UltraSOLV^® Sponge and wipe build up from the scrubbed area

NOTE:

THIS STEP WILL ELIMINATE USING EXCESS WIPERS AS THE SPONGE CAN BE REUSED DURING THE SCRUB PORTION OF THE PM

Step 7:

As Diamond ScrubPAD loads-up with deposition, pull ScrubPAD across damp UltraSOLV^® Sponge to properly unload (See Fig 5, 6 & 7)



Fig 5: ScrubPAD loaded with deposition	Fig 6: Pull ScrubPAD across UltraSOLV^® Sponge	Fig 7: Unloaded ScrubPAD

Step 8:

Unload the UltraSOLV^® Sponge by rinsing out thoroughly with DI water (See Fig 8 & 9)



	Fig 8: UltraSOLV^® Sponge loaded with deposition		Fig 9: UltraSOLV^® Sponge free of deposition after rinse in DI water

Step 9:

Repeat steps 3 – 8 for polishing the entire top edge of the cool station chamber. Unload ScrubPAD and UltraSOLV^® Sponge as necessary

Step 10:

When finished with scrub on top edge of cool station chamber, rinse out UltraSOLV^® Sponge with fresh DI water and wipe out the entire chamber using the dampened UltraSOLV^® Sponge

NOTE:

IF IT WAS NECESSARY TO SCRUB ANY AREA WITHIN THE COOL STATION CHAMBER, REMOVE AND REPLACE YOUR GLOVES WITH A NEW PAIR OF GLOVES PRIOR TO WIPING THE COOL STATION CHAMBER

NOTE:

IF IT WAS NECESSARY TO SCRUB ANY AREA WITHIN THE COOL STATION CHAMBER, TAKE CLEAN N2 OR He TO BLOW OUT THE SMALL AREAS AND TIGHT CORNERS WHERE DI WATER MAY HAVE BEEN CAPTURED

IMPORTANT NOTE

MUST USE HT5790S MiraWIPES^® AND HT1511FC MiraSWABS^® DURING WIPE PORTION OF PROCEDURE TO EFFECTIVELY REMOVE PARTICLE DEFECTS FROM NOVELLUS INOVA COOL STATION CHAMBER

NOTE:

Below is an example of the particles the HT1511FC MiraSWAB^® was able to remove from the hard to reach tight areas in the Novellus INOVA COOL STATION Chamber (See Fig 10 & 11)


	Fig 10 & 11: What the HT1511FC MiraSWAB^® was able to effectively remove from COOL STATION chamber

	MiraWIPES^® are the KEY STEP for DEFECT REDUCTION and IMPROVED TOOL RECOVERY

WIPING COOL STATION CHAMBER

NOTE:

Important to use HT1511FC MiraSWABS^® before HT5790S MiraWIPES^® as the MiraSWABS^® will be lifting particles out of the hard to reach areas and will have to follow wiping with the MiraWIPE^®

Step 11:

Dampen the HT1511FC MiraSWAB^® with IPA and wipe out the hard to reach areas, such as o-ring grooves, screw holes and tight corners (See Fig 12 & 13)




	Fig 12 & 13: MiraSWAB^® wiping out hard to reach areas throughout cool station chamber

Figure below shows how much more deposition the Foamtec International MiraWIPE^® can remove from a critical surface compared to the standard fab wiper, making the MiraWIPE^® FINAL WIPE PROCEDURE the most CRITICAL STEP of the PM procedure (See Fig 24a & 24b)


Fig 24a: Current fab wiper after completely wiping chamber		Fig 24b: Particles picked up using HT5790S MiraWIPES^® after completely wiping with current fab wiper


	MiraWIPES^® are the KEY STEP for DEFECT REDUCTION and IMPROVED TOOL RECOVERY

Step 12:

Fold the HT5790S MiraWIPE^® into quarters and dampen with IPA

NOTE:

IMPORTANT TO FULLY SATURATE THE MiraWIPE^® WITH IPA; THE MICROFIBER CHARACTERISTICS ARE MORE ABSORBENT AND WILL HOLD MORE IPA THAN ANY STANDARD FAB WIPER HELPING TO PERFORM A MORE EFFECTIVE FINAL WIPE

Step 13:

With the IPA dampened MiraWIPE^®, wipe down all areas of the cool station chamber, ensuring to refold the MiraWIPE^® as necessary to expose a clean side of the MiraWIPE^® as you wipe within the chamber

NOTE:

IT IS GOOD PRACTICE TO WIPE A CHAMBER FROM THE TOP DOWN AND FRONT TO BACK

NOTE:

REPLACE WITH A NEW DAMPENED MiraWIPE^® AS NECESSARY

Step 14:

Repeat above MiraWIPE^® & MiraSWAB^® FINAL WIPE PROCEDURE on all remaining areas of Novellus INOVA Cool Station chamber

NOTE:

IT IS EXTREMELY CRITICAL TO PERFORM THE FINAL WIPE ON THE COOL STATION CHAMBER PLATEN WITH THE UltraSOLV^® FOAM WIPER TO PREVENT GENERATING AND LEAVING FIBERS IN THE COOL STATION CHAMBER (SEE FIG 15)




	Fig 15: Fiber generated from wiping cool station chamber platen with standard fab wiper

Step 15:

Take the UltraSOLV^® foam wiper and fold into quarters (See Fig 16 & 17)



	Fig 16: UltraSOLV^® Foam Wiper


	Fig 17: UltraSOLV^® Foam Wiper folded into quarters

Step 16:

Dampen the UltraSOLV^® foam wiper with IPA and wipe the cool station chamber platen by PULLING the foam wiper across the platen

NOTE:

IT IS NECESSARY TO PULL THE FOAM WIPER ACROSS THE PLATEN AS THE CHARACTERISTICS OF THE FOAM WIPER WILL NOT ALLOW THE WIPER TO BE PUSHED

NOTE:

REFOLD FOAM WIPER AS NECESSARY TO EXPOSE A NEW AREA OF THE WIPER AFTER EACH SECTION HAS BEEN USED

Step 17:

Using proper procedures and safety guidelines bring cool station chamber back up to production

Scotch-Brite™ is a trademark of 3M Corporation