Home > Documents > Application Notes > Novellus Inova Vat Valve
Click Here for Printer Friendly Version
Foamtec Logo INOVA Vat Valve
 
Vacuum Chamber PM Technique
Novellus INOVA Vat Valve
 
OBJECTIVE:
TO EFFECTIVELY PM THE NOVELLUS INOVA VAT VALVE IN A TIMELY MANNER, WHILE IMPROVING TOOL RECOVERY AND PARTICLE PERFORMANCE
 
Vacuum Chamber: NOVELLUS INOVA PLATFORM 
Vacuum Chamber Process Residue: PROCESS INDUCED RESIDUE
Vacuum Chamber Components: ISOLATION VAT VALVE
Old Procedure: No method documented
Tool recovery: No recovery documented  
New Procedure: 1 hour using ScrubTIPS®, MiraSWABS® & MiraWIPES®with DI water and IPA
Tool recovery: TBD
Valve with Foamtec products
Vacuum Chamber Products:

Novellus INOVA Vat Valve PM Kit
  • (2) HT9423 CushionPAD 24” X 24”
  • (2) HT174913PD-1  1350 Grit Diamond ScrubTIP®
  • (2) HT1501FC-5 MiraSWABS® (10 MiraSWABS®)
  • (1) HT1585FC-5 MiraSWABS® (5 MiraSWABS®)
  • (2) HT5790S-5 MiraWIPES® (10 MiraWIPES®)
 
Novellus INOVA Vat Valve PM Procedure:
View “How to” instructional videos on http://www.foamtecintlwcc.com/video/
Step 1: Using proper procedures and safety guidelines, remove isolation VAT valve from INOVA platform
Step 2: Place two HT9423 CushionPADS on workstation next to each other and place VAT valve onto CushionPADS (See Fig 1)
Valve placed on CushionPADS
Fig 1: VAT valve placed onto HT9423 CushionPADS
Step 3: Using proper procedures and safety guidelines disassemble VAT valve (See Fig 2 & 3))
Vat valve disassembled for cleaning    VAT valve disassembled for cleaning
Fig 2 & 3: VAT valve disassembled for cleaning
Step 4: While VAT valve is disassembled, inspect the internals while cycling the valve manually.  Monitor the proper operation and note any areas that may be rubbing or have broken wafer-chips grinding
 
Step 5: Vacuum out the internals of VAT valve using a certified fab vacuum
 
Step 6: Dampen HT5790S MiraWIPE® with IPA and gently wipe out internals of VAT valve (See Fig 4 & 5)
MiraWIPE w/ IPA    Wiping VAT Valve
Fig 4 & 5: Lightly dampened MiraWIPE® wiping internals of VAT valve
MiraWIPES® and MiraSWABS® are the KEY STEP for DEFECT REDUCTION and IMPROVED TOOL RECOVERY
Step 7: Take HT1501FC and HT1585FC MiraSWABS®, dampen with IPA and wipe out all areas within VAT valve.  Continue to cycle valve manually to help wipe out all areas within valve (See Fig 6, 7, 8 & 9)
Dampened MiraSWAB    Wiping internals of VAT valve
Fig 6, 7, 8 & 9: Lightly dampened MiraSWAB® wiping internals of VAT valve
Wiping internals of VAT valve    Wiping internals of VAT valve
Step 8: Continue to operate VAT valve manually and, if necessary, breakdown valve further to clean gears and operating piston using the same technique described above
 
Step 9: Repeat steps 6 - 8 using freshly dampened MiraWIPES® and MiraSWABS® until internals of VAT valve have been cleaned and wiped out thoroughly
 
Step 10: Properly reassemble internals of VAT valve and replace cover (See Fig 10)
 
    Replacing cover over base of VAT valve
   
   
   
   
Fig 10: Replacing cover over base of VAT valve  
 
   
   
   
   
   
   
 
Step 11: Remove o-ring from base plate of VAT valve (See Fig 11)
Removing o-ring from base plate of valve
Fig 11: Removing o-ring from base plate of VAT valve
NOTE: DO NOT REMOVE O-RING WITH METAL TOOLS SUCH AS SCREW DRIVERS OR HEX TOOLS
Step 12: Inspect o-ring groove on valve base plate and if scratches are apparent then dampen HT174913PD-1 ScrubTIP® and polish scratches out of o-ring groove (See Fig 12 & 13)
ScrupTIP polishing scratch out of o-ring groove         ScrubTIP polishing scratch out of o-ring groove
Fig 12 &13: 1350 Grit Diamond ScrubTIP® polishing scratch out of o-ring groove
Step 13: When o-ring groove is free of scratches, use the same technique described above, lightly dampen MiraWIPE® and MiraSWABS® with IPA and thoroughly wipe out all areas of VAT valve base plate (See Fig 14, 15, 16 & 17)
MiraSWAB cleaning all areas of the base plate     MiraSWAB cleaning all areas of the base plate
Fig 14, 15, 16 & 17: MiraSWAB® cleaning all areas of the base plate
MiraSWAB cleaning all areas of the base plate     MiraSWAB cleaning all areas of base plate
Step 14: Inspect the o-ring for cracks or cuts and replace with new o-ring if necessary
Step 15: Prior to placing o-ring back into the o-groove, wipe the new or reused o-ring, using the following procedure:
  1. Saturate center of MiraWIPE®
  2. Fold MiraWIPE® three times diagonally to keep sealed edges away from o-ring
  3. Tightly fold center of MiraWIPE® around o-ring
  4. Pull the entire o-ring through the folded area two time
  5. Brush off any collected residue
Step 16: Carefully replace wiped o-ring back into o-ring groove
Step 17: Using the same technique as described above, dampen the MiraWIPES® and MiraSWABS® and effectively wipe the VAT valve sealing plate  (See Fig 18, 19, 20 & 21)
MiraSWAB and MiraWIPE effectively wiping VAT valve sealing plate    MiraSWAB and MiraWIPE effectively wiping VAT valve sealing plate
Fig 18 - 21: MiraSWAB® and MiraWIPE® effectively wiping VAT valve sealing plate
MiraSWAB and MiraWIPE effectively wiping VAT valve sealing plate     MiraSWAB and MiraWIPE effectively wiping VAT valve sealing plate     MiraSWAB and MiraWIPE effectively wiping VAT valve sealing plate
Step 18: Inspect the sealing surface of the VAT valve sealing plate to ensure there are no cuts or scratches along the sealing surface.  Replace VAT valve sealing plate if necessary
Step 19: Using the same technique as described above, remove o-ring from the cover of VAT valve sealing plate.  Inspect o-ring groove and polish groove with HT174913PD-1 ScrubTIP® if necessary
Step 20: Using the same technique as described above, dampen the MiraWIPES® and MiraSWABS® and effectively wipe the cover of the valve sealing plate  (See Fig 22, 23, 24, 25 & 26)
MiraSWAB and MiraWIPE effectively wiping cover of VAT valve sealing plate   MiraSWAB and MiraWIPE effectively wiping cover of VAT valve sealing plate
Fig 22 - 26: MiraSWAB® and MiraWIPE® effectively wiping cover of VAT valve sealing plate
MiraSWAB and MiraWIPE effectively wiping cover of VAT valve sealing plate     MiraSWAB and MiraWIPE effectively wiping cover of VAT valve sealing plate     MiraSWAB and MiraWIPE effectively wiping cover of VAT valve sealing plate
Step 21: Inspect the o-ring for cracks or cuts and replace with new o-ring if necessary
Step 22: Prior to placing o-ring back into the o-groove, wipe the new or reused o-ring, using the following procedure:
  1. Saturate center of MiraWIPE®
  2. Fold MiraWIPE® three times diagonally to keep sealed edges away from o-ring
  3. Tightly fold center of MiraWIPE® around o-ring
  4. Pull the entire o-ring through the folded area two times
  5. Brush off any collected residue
Step 23: Carefully replace wiped o-ring back into o-ring groove
Step 24: Replace sealing plate cover back onto the VAT valve base (See Fig 27)
Placing sealing plate cover back onto base of VAT valve
Fig 27: Placing sealing plate cover back onto base of VAT valve
Step 25: Cycle the VAT valve by applying external N2 and monitor for proper operation
Step 26: Using proper procedures and safety guidelines, replace VAT valve onto INOVA platform