| Click Here for Printer Friendly Version | ||
 |
 |
 |
| BEFORE | AFTER | |
| Vacuum Chamber PM Technique | ||
| Novellus HDP Speed 2 Dome Scrub | ||
| OBJECTIVE: | ||
TO EFFECTIVELY PM THE NOVELLUS HDP SPEED 2 CERAMIC DOME IN A TIMELY MANNER, WHILE IN-PLACE AND TO MINIMIZE TOOL DOWNTIME WHILE IMPROVING PARTICLE PERFORMANCE, TOOL RECOVERY AND REDUCE COST |
||
| Vacuum Chamber: | NOVELLUS HDP SPEED 2 | |
| Vacuum Chamber Process Residue: | PROCESS INDUCED RESIDUE | |
| Vacuum Chamber Components: | CERAMIC DOME |
| Old Procedure: | Replace dome every 5,000 to 10,000 wafers. Extendeddowntime, outgassing, recovery time & cost | |
| New Procedure: | 30 minutes, Foamtec International PM kit with DI water, reduced tool downtime, outgassing & recovery time REDUCES COST BY EXTENDING DOME LIFE >2x |
|
 |
|||||
| Vacuum Chamber Products: | |||||
| NOVELLUS HDP SPEED 2 DOME PM Kit | |||||
| PM Kit P/N: HT4500-NOVDM5 | |||||
| Novellus HDP Speed 2 In-Place Dome PM Procedure: | |||||
| View “How to” instructional videos on http://www.foamtecintlwcc.com/video/ | ||||||
| Step 1: | Using proper procedures and safety guidelines prepare Novellus Speed 2 Dome for wet clean | |||||
| Step 2: | Fill FT1301 plastic container with approximately 12oz of DI water and place on protective pad next to HDP Speed 2 Chamber (See Fig 1) | |||||
 |
||||||
Fig 1: FT1301 plastic container with DI water |
||||||
| Step 3: | Place HT4754 UltraSOLV® Sponge, ErgoSCRUB® w/ScrubDISK® and ScrubPAD in container of DI water to moisten products | |||||
| Step 4: | To prevent excess particles from entering Novellus Speed 2 Chamber during dome scrub procedure, ensure to cover chamber with a piece of plastic or an approved chamber cover | |||||
| Step 5: | Take dampened UltraSOLV® Sponge and wipe out the Novellus Speed 2 ceramic dome, removing all loose deposition and flakes. Continue to re-moisten the UltraSOLV® Sponge in container of DI water and wipe HDP Dome until as much of the deposition as possible has been removed with the UltraSOLV® Sponge (See Fig 2 & 3) | |||||
| Step 6: | Take dampened 280 Grit Diamond ScrubDISK® attached to ErgoSCRUB® and scrub areas throughout the Novellus ceramic dome. (See Fig 2) | |||||
 |
||||||
| NOTE: | WHEN SCRUBBING CERAMIC DOME, RECOMMEND PLACING UltraSOLV® SPONGE AT BOTTOM OF DOME TO ABSORB ANY EXCESS WATER DRAINING FROM THE 280 GRIT DIAMOND ScrubDISK® (See Fig 2) |
| Step 7: | As loose deposition begins to build up within the ceramic dome, use UltraSOLV® Sponge and wipe the area free of deposition (See Fig 3) |
 |
||||||
| Step 8: | Continue to rinse out sponge in container of DI water, as necessary, to free UltraSOLV® Sponge of excess deposition (See Fig 4) | |||||
 |
||||||
| Step 9: | As 280 Grit Diamond ScrubDISK® loads up with deposition, pull & twist ScrubDISK® across dampened UltraSOLV® Sponge to unload ScrubDISK® of deposition (See Fig 5, 6 & 7) |
 |
 |
 |
||||||
Fig 5: ScrubDISK® loaded with deposition |
Fig 6: Pull & twist ScrubDISK® across UltraSOLV® Sponge |
Fig 7: Unloaded ScrubDISK® |
||||||
| NOTE: | UNLOADING DIAMOND ScrubDISKS® IS A VERY IMPORTANT STEP THAT MUST BE FOLLOWED THROUGHOUT ENTIRE PM | ||
| Step 10: | As UltraSOLV® Sponge becomes loaded with deposition, rinse in container of DI water (See Fig 8 & 9) | ||
 |
 |
|||
Fig 8: Loaded-up UltraSOLV® Sponge |
Fig 9: UltraSOLV® Sponge AFTER rinse |
|||
| Step 11: | Repeat steps 5 – 10, scrubbing the remaining areas of the Novellus Ceramic Dome. Ensure to rinse out UltraSOLV® Sponge and unload 280 Grit Diamond ScrubDISK® onto the UltraSOLV® Sponge as necessary |
| Step 12: | Replace 280 Grit Diamond ScrubDISK® with 2nd ScrubDISK® when it begins to feel as though it is not removing any additional deposition |
| Step 13: | Using same technique as described above, take 280 Grit Diamond ScrubPAD and continue scrubbing ceramic dome, concentrating on edges of ceramic dome (See Fig 10) |
 |
|
| Step 14: | Replace 280 Grit Diamond ScrubPAD with 2nd ScrubPAD when it begins to feel as though it is not removing any additional deposition |
IMPORTANT NOTE |
|
IT IS NOT NECESSARY TO REMOVE ENTIRE STAIN EMBEDDED IN NOVELLUS SPEED 2 DOME. IT IS ONLY IMPORTANT TO REMOVE THE SHARP, ROUGH DEPOSITION BUILDUP THAT ACCUMULATES WITHIN DOME, DURING PROCESS |
|
| Step 15: | Use 280 Grit Diamond ScrubPAD and gently remove o-ring stain on sealing surface (See Fig 11) |
 |
|
| Step 16: | When dome appears to be efficiently clean, proceed to slide Diamond ScrubPAD over the entire dome using the back of your hand. Listen for any areas that may still appear rough or sharp and scrub accordingly. If you feel any rough areas and hear any scratching, those areas need to be re-scrubbed |
| Step 17: | When deposition is sufficiently removed throughout entire Novellus Ceramic Dome, rinse out UltraSOLV® Sponge with fresh DI water and re-wipe the entire dome in preparation for Final Wipe Procedure |
| DOME FINAL WIPE PROCEDURE: | |
| IMPORTANT NOTE | |
| AS THE NOVELLUS CERAMIC DOME IS AN EXTREMELY PARTICLE SENSITIVE AREA, THE FINAL WIPE PROCEDURE MUST BE FOLLOWED IN ITS ENTIRETY TO MAXIMIZE TOOL RECOVERY BENEFITS | |
| Step 18: | Take HT4790 UltraSOLV® Foam Wiper, fold into quarters and moisten a small area with DI water (See Fig 12 & 13) |
 |
|
| Step 19: | Using the dampened area on UltraSOLV® Foam Wiper wipe dome by GENTLY PULLING Foam Wiper across an area on the dome in one direction (See Fig 14) |
 |
|
| Step 20: | Turn UltraSOLV® Foam Wiper over and re-moisten a new small area on Foam Wiper with DI water; continue to wipe another area within dome by pulling Foam Wiper in one direction only |
| Step 21: | Continue to refold UltraSOLV® Foam Wiper as necessary ensuring to use a fresh area on the Foam Wiper for every wipe across the dome |
| Step 22: | Repeat steps 18 – 21, using all of the remaining UltraSOLV® Foam Wipers completely, re-wiping all areas as necessary |
| Chamber Final Wipe Procedure: | |
| IMPORTANT NOTE | ||
UPON COMPLETION OF CERAMIC DOME FINAL WIPE PROCEDURE, IT IS CRITICAL TO EFFECTIVELY WIPE OUT NOVELLUS SPEED 2 PROCESS CHAMBER WITH REMAINING HT5790S MiraWIPES® TO MAXIMIZE TOOL RECOVERY BENEFITS |
||
Figure below shows how much more deposition the Foamtec International MiraWIPE® can remove from a critical surface compared to the standard fab wiper, making the MiraWIPE® FINAL WIPE PROCEDURE the most CRITICAL STEP of the PM procedure (See Fig 15a & 15b) |
||
 |
||
Fig 15a: Current fab wiper after completely wiping HDP dome |
Fig 15b: Particles picked up using HT5790S MiraWIPES® after completely wiping with current fab wiper |
|
MiraWIPES® are the KEY STEP for DEFECT REDUCTION and IMPROVED TOOL RECOVERY |
||
| Step 23: | Using the HT5790S MiraWIPES®, moisten with IPA and wipe the entire Novellus Speed 2 Chamber as necessary | |||
| Step 24: | Ensure to wipe down all nozzles, pump ports, view ports, vacuum sealed surfaces, o-rings and parts to be placed back into the Novellus Speed 2 Chamber with the MiraWIPES® | |||
| Step 23: | If N2 or CDA (clean dry air) is available, blow out the Novellus Chamber to remove any remaining moisture and loose particles | |||
| Step 25: | Perform Novellus Speed 2 tool recovery as outlined by manufacturer |
|||
