Novellus HDP Speed 3 Dome Scrub PM Technique

As loose deposition begins to build up within the ceramic dome, take UltraSOLV^® Sponge and wipe the area free of deposition (See Fig 6 & 7)

Fig 6: UltraSOLV^® Sponge wiping area free of deposition

Fig 7: UltraSOLV^® Sponge loaded with deposition

Rinse sponge in container of DI water, as necessary to free UltraSOLV^® Sponge of excess deposition (See Fig 8 & 9)

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BEFORE		AFTER

Vacuum Chamber PM Technique
Novellus HDP Speed 3 Dome Scrub

OBJECTIVE:
TO EFFECTIVELY AND TIMELY PM THE NOVELLUS HDP SPEED 3 CERAMIC DOME IN-PLACE, WHILE MINIMIZING TOOL DOWNTIME, IMPROVING PARTICLE PERFORMANCE, TOOL RECOVERY AND REDUCING COST

	Vacuum Chamber:	NOVELLUS HDP SPEED 3
	Vacuum Chamber Process Residue:	PROCESS INDUCED RESIDUE
	Vacuum Chamber Components:	CERAMIC DOME


	Old Procedure:	Replace dome every 10,000 wafers extended outgassing & recovery time

	New Procedure:	30 MINUTES, Foamtec International PM Kit with DI water reduced outgassing & recovery time ELIMINATE COST OF REPLACING DOME


	Vacuum Chamber Products:
	NOVELLUS HDP SPEED 3 DOME PM Kit
	PM Kit P/N: HT4500-NOVDM4
		(1) HT4754 UltraSOLV^® Sponge (2) HT4528D-10-1 280 Grit Diamond ScrubPAD (2) HT4790-5 UltraSOLV^® Foam Wipes (2) HT5790S-5 MiraWIPES^®


			Foamtec International ErgoSCRUB^® and Diamond ScrubDISK^® may be included if desired
*Novellus HDP Speed 3 In-Place* Dome** PM Procedure:


View “How to” instructional videos on http://www.foamtecintlwcc.com/video/

Step 1:	Using proper procedures and safety guidelines to prepare Novellus Speed 3 Dome for wet clean

Step 2:	Stage a small container of DI water inside a large plastic bag next to Speed 3 equipment

Step 3:	Place HT4754 UltraSOLV^® Sponge, ErgoSCRUB^® w/ScrubDISK^® and ScrubPAD in container of DI water to moisten products (See Fig 1)






		Fig 1: Foamtec International products in small container of DI water







Step 4:	Use dampened UltraSOLV^® Sponge to wipe out the Novellus Speed 3 ceramic dome, removing all loose deposition or flakes. Continue to re-moisten the UltraSOLV^® Sponge in container of DI water and wipe HDP dome until as much of the deposition as possible has been removed with UltraSOLV^® Sponge (See Fig 2 & 3)


		Fig 2: UltraSOLV^® Sponge performing initial wipe of ceramic dome	Fig 3: UltraSOLV^® Sponge removing loose deposition

Step 5:	After wiping of dome with UltraSOLV^® Sponge is completed, use dampened 280 Grit Diamond ScrubPAD and scrub areas throughout the Novellus ceramic dome (See Fig 4)

May use ErgoSCRUB^® with 280 Grit Diamond ScrubDISK^® if desired (See Fig 5)



						Fig 4: 280 Grit Diamond ScrubPAD scrubbing ceramic dome



			Fig 5: ErgoSCRUB^® with 280 Grit Diamond ScrubDISK^® scrubbing ceramic dome



	Fig 8: UltraSOLV^® Sponge loaded with deposition	Fig 9: UltraSOLV^® Sponge after rinsing with DI water

Step 8:	As ScrubPAD loads up with deposition, pull ScrubPAD across UltraSOLV^® Sponge to unload ScrubPAD of deposition (See Fig 10, 11 & 12)

280 Grit Diamond ScrubDISK^® used in picture below

	Fig 10: ScrubDISK^® loaded with deposition			Fig 11: Pull & twist ScrubDISK^® across UltraSOLV^® Sponge			Fig 12: Unloaded ScrubDISK^®

NOTE:	STEPS 7 & 8 ARE CRITICAL STEPS THAT MUST BE FOLLOWED THROUGHOUT ENTIRE PM

Step 9:	Repeat steps 5 – 8, scrubbing the remaining areas of the Novellus Ceramic Dome. Rinse out UltraSOLV^® Sponge and unload 280 Grit Diamond ScrubPAD onto the UltraSOLV^® Sponge as necessary (See Fig 13 & 14)

	Fig 13: Loaded-up UltraSOLV^® Sponge		Fig 14: UltraSOLV^® Sponge AFTER rinse

Step 10:	Replace 280 Grit Diamond ScrubPAD with 2nd ScrubPAD when ScrubPAD begins to feel as though it is not removing any additional deposition (may not be necessary)

Step 11:	Use ScrubPAD and gently remove o-ring stain along the edge of Speed 3 HDP Dome using same procedure as described above (See Fig 15)

			Fig 15: ScrubPAD gently removing o-ring stain on edge of HDP dome

IMPORTANT NOTE

IT IS NOT NECESSARY TO REMOVE ENTIRE STAIN EMBEDDED IN NOVELLUS SPEED DOME. IT IS ONLY IMPORTANT TO REMOVE THE SHARP, ROUGH DEPOSITION BUILDUP THAT ACCUMULATES WITHIN DOME DURING PROCESS

Step 12:	When dome appears to be sufficiently clean, slide Diamond ScrubPAD over the entire dome using the back of your hand. Listen for any areas that may still appear rough or sharp and scrub accordingly. If you feel any rough areas and hear any scratching, those areas need to be re-scrubbed

Step 13:	When deposition throughout entire Novellus Ceramic Dome has been sufficiently removed, rinse out UltraSOLV Sponge with fresh DI water and re-wipe the entire dome in preparation for FINAL WIPE PROCEDURE

NOVELLUS CERAMIC DOME FINAL WIPE PROCEDURE:

IMPORTANT NOTE

AS THE NOVELLUS CERAMIC DOME IS AN EXTREMELY PARTICLE SENSITIVE AREA, THE FINAL WIPE PROCEDURE MUST BE FOLLOWED IN ITS ENTIRETY TO MAXIMIZE TOOL RECOVERY BENEFITS

Step 14:	Use HT5790S MiraWIPE^® moistened with DI water and wipe out entire area of HDP dome. Plan to use (5) MiraWIPES^® for this application (See Fig 16)


		Fig 16: HT5790S MiraWIPE with DI water wiping dome



Step 15:	Use a HT4790 UltraSOLV^® Foam Wipe folded into quarters and moisten a small area with DI water (See Fig 17 & 18)


		Fig 17: HT4790 UltraSOLV^® Foam Wipe	Fig 18: Moistening UltraSOLV^® Foam Wipe with DI water

Step 16:	Using the dampened area on UltraSOLV^® Foam Wipe, wipe dome by GENTLY PULLING Foam Wipe in one direction across an area on dome (See Fig 19)


		Fig 19: UltraSOLV^® Foam Wipe pulling across ceramic dome


Step 17:	Refold UltraSOLV^® Foam Wipe to a clean section and re-moisten a new small area on Foam Wipe with IPA and wipe by pulling Foam Wipe in one direction only across another area within dome

Step 18:	Continue to refold UltraSOLV^® Foam Wipe to use a fresh area on the Foam Wipe for every wipe across the dome

Step 19:	Repeat steps 15 – 18, using all of the remaining UltraSOLV^® Foam Wipes, re-wiping all areas as necessary

Step 20:	If N₂ or CDA (clean dry air) is available, blow out the Novellus Ceramic Dome to remove any remaining moisture and loose particles

IMPORTANT NOTE

UPON COMPLETION OF HDP DOME FINAL WIPE PROCEDURE, IT IS CRITICAL TO EFFECTIVELY WIPE OUT NOVELLUS SPEED 3 PROCESS CHAMBER WITH REMAINING HT5790S MiraWIPES^® TO MAXIMIZE TOOL RECOVERY BENEFIT

Figure below shows how much more deposition the Foamtec International MiraWIPE^® can remove from a critical surface compared to the standard fab wiper, making the MiraWIPE^® FINAL WIPE PROCEDURE the most CRITICAL STEP of the PM procedure (See Fig 20a & 20b)


Fig 20a: Current fab wiper after completely wiping HDP dome		Fig 20b: Particles picked up using HT5790S MiraWIPES^® after completely wiping with current fab wiper


	MiraWIPES^® are the KEY STEP for DEFECT REDUCTION and IMPROVED TOOL RECOVERY


Step 21:	Use the remaining HT5790S MiraWIPES^® moistened with fresh DI water to wipe the entire Novellus Speed 3 Chamber as necessary

Step 22:	Use the HT5790S MiraWIPES^® to wipe down all nozzles, pump ports, view ports, vacuum sealed surfaces, o-rings and other parts to be placed back into the Novellus Speed 3 Chamber

Step 23:	If N₂ or CDA (clean dry air) is available, blow out the Novellus Chamber to remove any remaining moisture and loose particles

Step 24:	Perform Novellus Speed 3 Tool Recovery as outlined by manufacturer