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| Vacuum Chamber PM Technique | ||
| Novellus Concept 1 & 2 Shower Head Wipe | ||
| OBJECTIVE: | ||
| TO EFFECTIVELY PM NOVELLUS CONCEPT SHOWER HEAD IN A TIMELY MANNER, WHILE IMPROVING TOOL RECOVERY, PARTICLE PERFORMANCE AND REDUCING HAZARDOUS WASTE | ||
| Vacuum Chamber: | NOVELLUS CONCEPT 1 & 2 | |
| Vacuum Chamber Process Residue: | PROCESS INDUCED RESIDUE | |
| Vacuum Chamber Components: | SHOWER HEADS |
| Old Procedure: | DI water, 50+ wipers |
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| New Procedure: | DI water, Foamtec Foam Wipers | |
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| Vacuum Chamber Products: | |||
The Foamtec International PilloWIPES® and UltraSOLV® Foam Wipers are sponge-like 9x9 wipers that can effectively wipe the Novellus hot shower heads, while protecting the technicians |
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| Novellus Concept Shower Head Wipe PM Procedure: | |||||||
| View “How to” instructional videos on http://foamtecintlwcc.com/video/ | |||||||
| Step 1: | Using proper procedures and safety guidelines properly shutdown, vent and prepare to perform Novellus Shower Head Wipe | ||||||
| Step 2: | Fold the FS4291 PilloWIPE® into ¼’s and soak with DI water (See Fig 1) | ||||||
| NOTE: | DUE TO THE PilloWIPE®’s SPONGE-LIKE CHARACTERISTICS, SUFFICIENT DI WATER WILL BE NEEDED TO PROPERLY SOAK PilloWIPE® THROUGH. ENSURE TO SQUEEZE TO WORK IN THE DI WATER | ||||||
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Fig 1: FS4291 PilloWIPE® Folded into 1/4's and soaked with DI water
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| Step 3: | In a pulling motion, proceed to wipe shower head from back to front (See Fig 2 & 3) | ||||||
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Fig 2 & 3: Pull FS4291 from back to front across shower head |
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| NOTE: | REFOLD PilloWIPE® AND CONTINUE TO WIPE SHOWER HEAD USING A FRESH AREA OF PilloWIPE® | ||||||
| Step 4: | Repeat process for remaining Novellus shower heads | ||||||
| Step 5: | Inspect Novellus Shower Heads and re-wipe any questionable areas, ensuring to use a fresh side of the PilloWIPE® | ||||||
| FINAL WIPE PROCEDURE: | |||||||
| IMPORTANT NOTE | ||
THE USE OF HT5790S MiraWIPES® DURING FINAL WIPE PORTION OF PROCEDURE IS A CRITICAL STEP TO EFFECTIVELY REMOVING PARTICLE DEFECTS |
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Figure below shows how much more deposition the Foamtec International MiraWIPE® can remove from a critical surface compared to the standard fab wiper, making the MiraWIPE® FINAL WIPE PROCEDURE the most CRITICAL STEP of the PM procedure (See Fig 4a & 4b) |
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Fig 4a: Current fab wiper after completely wiping showerhead |
Fig 4b: Particles picked up using HT5790S MiraWIPES® after completely wiping with current fab wiper |
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MiraWIPES® are the KEY STEP for DEFECT REDUCTION and IMPROVED TOOL RECOVERY |
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| Step 6: | Dampen the HT5790S MiraWIPES® with IPA and perform a THOROUGH AND EFFECTIVE WIPE-DOWN of all vacuum sealing surfaces on the Novellus chamber |
| Step 7: | Ensure to wipe down all spare parts placed back into the Novellus Concept Chamber using additional IPA dampened HT5790S MiraWIPES® |
