Varian Kestrel Charge Exchange Housing PM Technique

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BEFORE		AFTER

Vacuum Chamber PM Technique
Varian Kestrel Charge Exchange Housing

OBJECTIVE:

TO EFFECTIVELY PM THE VARIAN KESTREL CHARGE EXCHAGE HOUSING IN A TIMELY MANNER WHILE HELPING TO REDUCE CLEANTIME AND IMPROVE TOOL PERFORMANCE

	Vacuum Chamber:	VARIAN KESTREL
	Vacuum Chamber Process Residue:	PROCESS INDUCED RESIDUE
	Vacuum Chamber Components:	CHARGE EXCHANGE HOUSING


	Old Procedure:	1+ hours using DI water & IPA with 100+ wipes Recovery time: ?? Interval: Monthly

	New Procedure:	30 minutes using Diamond ScrubPAD, ScrubWRIGHT™ Pen, Diamond ScrubTIP^® MiraWIPE^® Recovery time: ??


	Vacuum Chamber Products:
		(1) HT4528D-10-1 280 Grit Diamond ScrubPAD (2) HT4528DW-1 280 Grit Diamond ScrubBELT^® (1) FTPEN-1 ScrubWRIGHT™ PEN (1) HT4754 UltraSOLV^® Sponge (1) HT5790S-5 MiraWIPES^® (5 MiraWIPES^®) (2) HT174936D-1 Diamond ScrubTIP^®

Varian Kestrel Charge Exchange Housing PM Procedure:

View “How to” instructional videos on http://foamtecintlwcc.com/video/

Step 1:

Using proper procedures and safety guidelines prepare Varian Kestrel Charge Exchange Housing for clean

Step 2:

Fill a small container with DI water and place next to the tool (See Fig 1)

Place in container of DI water

Fig 1: Plastic container with DI water

Step 3:

Place HT4528D 280 Grit Diamond ScrubPAD and HT4754 UltraSOLV^® Sponge into the container of DI water

Step 4:

Vacuum out any flakes and loose material from the housing. Wring out the UltraSOLV^® Sponge and wipe out the housing to pick up any remaining loose material

Step 5:

Using the lightly dampened 280 Grit Diamond ScrubPAD start to clean a small area in the Charge Exchange Housing (See Fig 2)

Fig 2: Scrub small area using 280 Grit Diamond ScrubPAD

Step 6:

Use the lightly dampened UltraSOLV^® Sponge to remove the excess deposition from the area that was just scrubbed (See Fig 3)

Fig 3: Wipe with the lightly dampened UltraSOLV^® Sponge

Step 7:

As Diamond ScrubPAD loads-up with deposition, pull ScrubPAD across damp UltraSOLV^® Sponge to properly unload (See Fig 4, 5 & 6)

Fig 4: ScrubPAD loaded with deposition

Fig 5: Pull ScrubPAD across UltraSOLV^® Sponge

Fig 6: Unloaded ScrubPAD

Step 8:

Ensure to unload UltraSOLV^® Sponge as much as possible by placing it back in container of DI water and RINSE-OUT thoroughly (See Fig 7 & 8)

Fig 7: Loaded-up UltraSOLV^® Sponge

Fig 8: UltraSOLV^® Sponge AFTER rinse

Step 9:

For tight corners and edges, place the HT4528DW-1 ScrubBELT^® onto the FTPEN-1 ScrubWRIGHT™ Pen and proceed to scrub these areas with the tip of the ScrubWRIGHT™ Pen. Use the same unloading procedure for the ScrubBELT^® as described above and ensure to rotate the ScrubBELT^® as necessary to prevent from breaking (See Fig 9 & 10)

Fig 9 &10:ScrubWRIGHT™ Pen cleaning edge

Step 10:

Repeat steps 5 – 9 for all remaining areas throughout Charge Exchange Housing. Remember to unload ScrubPAD and UltraSOLV^® Sponge accordingly

Step 11:

Take source housing, source magnet, and cell manipulator to an exhausted work bench for cleaning

Step 12:

Using the same technique described above clean deposition off of the source housing using the HT4528D 280 Grit Diamond ScrubPAD and the HT4754 UltraSOLV^® Sponge (See Fig 11 & 12)

BEFORE

AFTER

Fig 11 & 12: Source housing after 5 minutes of cleaning

Step 13:

Use the HT174936D Diamond ScrubTIP^® to remove deposition from the inside lip of the source housing (See Fig 13)

Fig 13: Remove buildup from the inside lip of the source housing using 360 Grit Diamond ScrubTIP^®

Step 14:

Using the same technique described above, clean deposition off of the source magnet and cell manipulator baseplate using the HT4528D 280 Grit Diamond ScrubPAD and the HT4754 UltraSOLV^® Sponge (See Fig 14, 15 & 16)

	Fig 14, 15 & 16: Remove buildup from the source housing and cell manipulator baseplate with 280 Grit Diamond ScrubPAD

Step 15:

When scrub portion of clean is complete prepare housing and assemblies for FINAL WIPE PROCEDURE by rinsing out UltraSOLV^® Sponge with fresh DI water and performing a complete final Charge Exchange Housing wipe using the dampened UltraSOLV^® Sponge

Step 16:

Prior to final wipe, remove and replace your gloves with a clean pair

Step 17:

If available, use clean dry N₂ to blow out the small areas, feedthroughs, screw holes and tight corners where DI water may have accumulated during the wet clean

FINAL WIPE PROCEDURE:

IMPORTANT NOTE

THE USE OF HT5790S MIRAWIPES^® DURING FINAL WIPE PORTION OF PROCEDURE IS A CRITICAL STEP TO EFFECTIVELY REMOVING PARTICLE DEFECTS

Figure below shows how much more deposition the Foamtec International MiraWIPE^® can remove from a critical surface compared to the standard fab wiper, making the MiraWIPE^® FINAL WIPE PROCEDURE the most CRITICAL STEP of the PM procedure (See Fig 17a & 17b)


Fig 17a: Current fab wiper after completely wiping chamber		Fig 17b: Particles picked up using HT5790S MiraWIPES^® after completely wiping with current fab wiper

	MiraWIPES^® are the KEY STEP for DEFECT REDUCTION and IMPROVED TOOL RECOVERY

Step 18:

Saturate the HT5790S MiraWIPE^® with IPA and perform a thorough wipe of the Charge Exchange Housing (See Fig 18)

Perform a thorough wipedown on all areas of the housing with MiraWIPES and IPA

Fig 18: Perform a thorough wipedown on all areas of the housing with MiraWIPES® and IPA

Step 19:

Using the approved safety procedures and guidelines return the tool back to production

Cleaned Chamber

Fig 19

Fig 20: Total amount of hazardous waste generated using Foamtec Vacuum Chamber PM Technique