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Before Foamtec Logo After
BEFORE AFTER
Vacuum Chamber PM Technique
Varian VIISion™ 80 Source Chamber
OBJECTIVE:

TO EFFECTIVELY PM THE VARIAN VIISION™ 80 SOURCE CHAMBER IN A TIMELY MANNER, WHILE HELPING TO MINIMIZE PARTICLE ISSUES, IMPROVE TOOL PERFORMANCE AND REDUCE HAZARDOUS WASTE
 
Vacuum Chamber: VARIAN VIISION™ 80 SOURCE CHAMBER
Vacuum Chamber Process Residue: BF3, P, SB, IN, ASH3 BEAM DEPOSITION
Vacuum Chamber Components: SOURCE CHAMBER
Old Procedure: Scotch-Brite™, hydrogen peroxide (H2O2), 40 grit sand paper, wire mesh
Solvent: DI water, IPA (only)
DANGER:
Use of Hydrogen Peroxide (H2O2) causes a variety of Environmental, Health, and Safety concerns. Can cause prolonged pump down times and High Voltage Arcing.  Breathing Apparatus and Full Acid PPE is recommended while scrubbing with H2O2.  Scrubbing Phosphorus while using H2O2 increases the Risk of fires and/or the Release of Hazardous Chemical Fumes, Potentially resulting in Personal Injury and Property Damage
Vacuum Chamber Products:
  • (1) HT4754 UltraSOLV® Sponge
  • (2) HT4536D-10 360 Grit Diamond ScrubPAD
  • (1) HT4536DC3-1  360 Grit Diamond ScrubDISK®
  • (1) FT901  Soft handle w/Loop ErgoSCRUB®
  • (3) HT179036D  360 Grit Diamond ScrubTIP®
  • (1) HT5790S-25  MiraWIPE® Wipers

NOTE:  INITIAL CLEAN MAY REQUIRE THE USE OF ADDITIONAL PRODUCTS TO EFFECTIVELY CLEAN CHAMBER BACK TO BARE METAL

RECOMMEND:  PERFORM A ROUND OF 2-3 PM’S ON SAME TOOL TO ESTABLISH SUFFICIENT DATA FOR EVALUATION
Varian VIISion™ 80 Source Chamber CleanPM Procedure:
View “How to” instructional videos on http://www.foamtecintlwcc.com/video/
Step 1: Remove all source parts from source chamber (source head, bushing, etc…).
Step 2: Vacuum inside of the chamber using an approved arsenic vacuum system.
 
Step 3: Wipe-down inside of the chamber using an H2O dampened UltraSOLV® HT4754 Sponge.
 
Step 4: Using a DI water dampened HT4536DC-1 ScrubDISK®, attached to the FT901 ErgoSCRUB®, scrub an 8”x8” area within the source chamber.
 
Step 5: Wipe-down the affected chamber area using the DI water dampened UltraSOLV® HT4754 sponge.
 
Step 6: Unload the ScrubDISK® of deposition by wiping the UltraSOLV® HT4754 Sponge with the ScrubDISK® in one direction (See Fig 1, 2 & 3).
Loaded ScrubPAD
Pull ScrubPAD across sponge
Unloaded ScrubPAD
Fig 1: ScrubDISK® loaded with deposition
Fig 2: Pull & twist ScrubDISK® across UltraSOLV® Sponge
Fig 3: Unloaded ScrubDISK®
   
Step 7: Unload the UltraSOLV® HT4754 Sponge by moistening with DI water and ringing out into a HazMat container (See Fig 4 & 5).
   
Sponge loaded with deposition                      UltraSOLV Sponge free of deposition
                Fig 4: UltraSOLV® Sponge loaded with deposition        
Fig 5: UltraSOLV® Sponge free of deposition after rinse in DI water  
   
Step 8: Repeat steps 4 – 7, using the HT4536D ScrubPAD and the HT179036D ScrubTIP® where necessary, until all deposition is removed.
   
FINAL WIPE PROCEDURE:
 
IMPORTANT NOTE
THE USE OF HT5790S MiraWIPES® DURING FINAL WIPE PORTION OF PROCEDURE IS A CRITICAL STEP TO EFFECTIVELY REMOVING PARTICLE DEFECTS FROM CHAMBER DOOR.
 
Figure below shows how much more deposition the Foamtec International MiraWIPE® can remove from a critical surface compared to the standard fab wiper, making the MiraWIPE® FINAL WIPE PROCEDURE the most CRITICAL STEP of the PM procedure. (See Fig 6a & 6b)
MiraWIPES are more effective
Fig 6a: Current fab wiper after completely wiping the chamber.
Fig 6b: Particles picked up using HT5790S MiraWIPES® after completely wiping with current fab wiper.
Red Arrow
Red Arrow
 
MiraWIPES® are the KEY STEP for DEFECT REDUCTION and IMPROVED TOOL RECOVERY.
Step 9: Repeatedly wipe the inside of the source chamber using an IPA dampened HT5790S MiraWIPE®.  Ensure to wipe entire chamber effectively until all areas are removed of deposition. 
SOURCE CHAMBER – BEFORE CLEANING
Before
Before
  Red Arrow Red Arrow  
 
Fig 7, 8 & 9: Arsenic, Boron, Phosphorus, Antimony . . .
  
  Red Arrow  
Before
 
SOURCE CHAMBER – AFTER CLEANING
 
After After
Arrows
 

Fig 10 & 11: PM completed using only DI water and IPA for final wipe-down.

NO H2O2 (Hydrogen Peroxide)

  
     
Accumulated waste
     
 

Fig 12: Total amount of hazardous waste generated.

  
     

Scotch-Brite™ is a trademark of 3M Corporation