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Before
 Foamtec Logo
After
BEFORE AFTER
 
Vacuum Chamber PM Technique
WCVD NVLS Altus Heater Clean
 
OBJECTIVE:
TO EFFECTIVELY PM THE WCVD NVLS ALTUS HEATER IN A TIMELY MANNER, WHILE IMPROVING BACKSIDE PRESSURE FAULT AND PARTICLE PERFORMANCE
   
Vacuum Chamber: NVLS/WCVD
Vacuum Chamber Process Residue: THICKER FILM DEPOSITION
Vacuum Chamber Components: ALTUS HEATER
 
Old Procedure: 2 hours

Tool Recovery: Induced backside pressure fault and particle issues
 
New Procedure: DI water, Foamtec Products, 0.5 hour, 1 technician
 

Tool Recovery: Reduced recovery time and no particle issues

 
Vacuum Chamber Products:
(1) HT4536DC3-1 360 Diamond Grit ScrubDISK®
(1) HT4513PDC3-1 1350 Diamond Grit ScrubDISK®
(1) HT5790S-25 MiraWIPE® Wiper
(1) HT4754 UltraSOLV® Sponge
(1) FT951 ErgoSCRUB® Firm Handle
 
 
UltraSOLV Sponge MiraWIPE Wiper ScrubDISK ScrubDISK ErgoSCRUB
 
WCVD NVLS Altus Heater PM Procedure:
 
View “How to” instructional videos on http://www.foamtecintlwcc.com/video/
 
Step 1:

Using proper procedures and safety guidelines, properly prepare NVLS Altus fro heater scrub and clean
 
Step 2:

Using the dummy wafer, check the backside pressure before polishing. The NVLS vendor suggests to proceed heater polish if pressure >10Torr (See Fig 1)
 
Checking backside pressure  
Fig 1: Use dummy wafer to check the backside pressure before polishing
 
Step 3: Use the FT951 ErgoSCRUB® Firm Handle with HT4536DC3-1 Diamond ScrubDISK® to “DRY” polish the heater surface (See Fig 2)
 
   
Dry polishing surface
 

Fig 2: “DRY” polishing the heater surface

  
 
 
Step 4:

Polish the heater in a “Figure 8” motion in order to keep the best uniformity. At the beginning, the user will feel a stronger friction while polishing which is caused by the thicker process film and will be released within 5-10 minutes of scrubbing
 
Step 5: When ScrubDISK® becomes loaded up with deposition, pull across UltraSOLV® Sponge to unload ScrubDISK®. This helps to keep the function and efficiency of the ScrubDISK® (See Fig 3, 4 & 5)
 
Loaded ScrubDISK
Pull ScrubDISK across Sponge
Unloaded ScrubDISK
   
Fig 3: ScrubDISK® loaded with deposition
  
Fig 4: Pull ScrubDISK® across UltraSOLV® Sponge
 
Fig 5: Unloaded ScrubDISK®
 
Step 6: As UltraSOLV® Sponge becomes loaded with deposition, rinse in container of DI water (See Fig 6 & 7)
 
Loaded UltraSOLV Sponge
UltraSOLV after rinse
Fig 6: Loaded-up UltraSOLV® Sponge
Fig 7: UltraSOLV® Sponge AFTER rinse
 
Step 7: Use a vacuum cleaner to suck up the excess particles throughout the entire heater surface. Then use a MiraWIPE® Wiper to sufficiently wipe down the whole heater (See Fig 8 & 9)
 
Vacuuming loose particles
Wipe down whole heater
Fig 8: Vacuum cleaner sucking up the particles
Fig 9: Wipe down the whole heater with MiraWIPES®
 
FINAL WIPE PROCEDURE:
 
IMPORTANT NOTE
THE USE OF HT5790S MiraWIPES® DURING FINAL WIPE PORTION OF PROCEDURE IS A CRITICAL STEP TO EFFECTIVELY REMOVING PARTICLE DEFECTS FROM HEATER
 
Figure below shows how much more deposition the Foamtec International MiraWIPE® can remove from a critical surface compared to the standard fab wiper, making the MiraWIPE® FINAL WIPE PROCEDURE the most CRITICAL STEP of the PM procedure (See Fig 10a & 10b)
 
MiraWIPES are more effective
Fig 10a: Current fab wiper after completely wiping heater
Fig 10b: Particles picked up using HT5790S MiraWIPES® after completely wiping with current fab wiper
Red Arrow
Red Arrow
 
MiraWIPES® are the KEY STEP for DEFECT REDUCTION and IMPROVED TOOL RECOVERY
 
Step 7:

Use the dummy wafer to check backside pressure after cleaning. If the pressure
>10Torr, you can continue polishing until the NVLS pressure Spec is (<10 Torr) (See Fig 11)
 
 
Checking pressure
  
 
Fig 11: Use dummy wafer to check the backside pressure under spec (<10Torr)
  
 
 
Completed NVLS Altus heater

COMPLETED NVLS ALTUS HEATER POLISH AND CLEAN