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ScrubWRIGHT® P/N: FTPEN-1 |
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A unique tool for cleaning small, hard to reach areas. Interchangeable belt-shaped Diamond ScrubBELTS® in various grits create a versatile instrument perfect for polishing stains, scratches and process-induced residue from scratch sensitive surfaces. Spring adjustable for easy mounting and rotation of ScrubWRIGHT® ScrubBELT®.
| Advantages |
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Improved Cost of Ownership "COO": Enables in-chamber cleaning of parts and eliminates Downtime and High Cost associated with removing and sending parts out for cleaning. |
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Helps Reduce Particles: Effectively removes deposition from areas Critical to Process (Edge of ESC, Beam Defining Apertures...) to prevent unwanted flaking. |
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Safely Removes Deposition from Sensitive Areas: Able to focus Diamond ScrubBELT®directly onto a small area of deposition, preventing excess wear in surrounding areas. |
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Reduces Damage to Critical Parts: Eliminates having to use Scotch-Brite™, razor blades and ceramic knives. |
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Wide Selection of Diamond ScrubBELTS®: Allows for quick removal of deposition from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces. |
| Description |
| Part Number | Dimensions | Tip Dimensions | Material | ScrubBELTS |
| FTPEN-1 | 165mm x 13mm x 10mm | 6mm/15º Angle | High Impact Plastic w/Spring-Tensioned Attachment Mechanism | Diamond Grit: 280 to 1350 (See Pg 4 for P/N) |
ErgoWRENCH® |
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Unique tool used for safer and more efficient scrubbing of hard to reach areas throughout vacuum chambers. The soft ergonomic grip provides ease of use, while stiff swivel head can be adjusted to optimize scrubbing angles. Different size Heads and Handles are interchangeable, which allows the ErgoWRENCH® to be adjusted for different applications.
| Advantages |
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Improves Tool Availability: Reduces scrub-time by focusing Diamond ScrubPAD directly onto Heavy Deposition buildup, quickly taking chamber back to bare metal. |
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Helps Reduce Particles: Removes heavy deposition from areas critical to production, preventing unwanted flaking. |
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Safely Removes Deposition from Sensitive Areas: Able to focus Diamond ScrubPAD directly onto area of deposition to prevent excess wear of surrounding areas. |
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Wide Selection of Diamond ScrubPADS: Allows for quick removal of deposition from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear. |
| Description |
 HT5004 GRIP FT850 HANDLE |
 FT821R LARGE SWIVEL HEAD (38.1 x 38.1 x 38.1) |
 FT823R LARGE SWIVEL HEAD (Rotates 90o) (38.1 x 38.1 x 38.1) |
 FT822R MEDIUM SWIVEL HEAD (21.6 x 38.1 x 29.2) |
 FT824R SMALL SWIVEL HEAD (12.7 x 38.1 x 22.8) |
All head measurements (A x B x C) are in millimeters. |
| FEATURES | MATERIAL | ScrubPADS |
| Swivel Parallel to Curve (FT823R Swivel Perpendicular to Curve) |
Delrin Plastic w/Hook for ScrubPAD Attachment |
280, 360 & 800 Diamond Grits Available (See Pg 4 for P/N's) |
VAT VALVE PM HANDLE |
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A unique tool used to reach back into the deep areas of confined spaces, such as VAT Valves, Beam-Lines, Pump-Ports, Chamber Throats…
| Applications |
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| ScrubWRIGHT FTPEN-1 | ErgoWRENCH® Tools | |
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| VAT VALVE PM HANDLE |
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Chamber Cleaning Tools
PARTS LIST
| ScrubWRIGHT® | ScrubBELTS® | ||||||
| PART NUMBER |
DESCRIPTION | PART NUMBER | DESCRIPTION | ||||
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FTPEN-1 | ScrubWRIGHT® PEN | HT4528DW-5 | 280 Grit Diamond ScrubBELTS® | |||
| HT4536DW-5 | 360 Grit Diamond ScrubBELTS® | ||||||
| HT4580DW-5 | 800 Grit Diamond ScrubBELTS® | ||||||
| HT4513PDW-5 | 1350 Grit Diamond ScrubBELTS® | ||||||
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ErgoWRENCH® Head | ErgoWRENCH® ScrubPADS | |||||
| PART NUMBER |
DESCRIPTION | PART NUMBER | DESCRIPTION | ||||
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FT818 | FIXED SQUARE HEAD |
HT4536DR4-1 | 360 Grit Diamond ScrubPAD | |||
| HT47818 | UltraSOLV® Foam Wiper | ||||||
| HT57818 | MiraWIPE® Over Foam | ||||||
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FT821 FT821R |
FIXED HEAD SWIVEL HEAD: LARGE |
HT4528D81-1 | 280 Grit Diamond ScrubPAD | ||
| HT4536D81-1 | 360 Grit Diamond ScrubPAD | ||||||
| HT4580D81-1 | 800 Grit Diamond ScrubPAD | ||||||
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FT822 FT822R |
FIXED HEAD SWIVEL HEAD: MEDIUM |
HT4528D82-1 | 280 Grit Diamond ScrubPAD | ||
| HT4536D82-1 | 360 Grit Diamond ScrubPAD | ||||||
| HT4580D82-1 | 800 Grit Diamond ScrubPAD | ||||||
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FT823 | SWIVEL HEAD: LARGE (ROTATES 90o FROM FT821R HEAD) |
HT4528D81-1 | 280 Grit Diamond ScrubPAD | |||
| HT4536D81-1 | 360 Grit Diamond ScrubPAD | ||||||
| HT4580D81-1 | 800 Grit Diamond ScrubPAD | ||||||
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FT824 FT824R |
FIXED H EAD |
HT4528D83-1 | 280 Grit Diamond ScrubPAD | ||
| HT4536D83-1 | 360 Grit Diamond ScrubPAD | ||||||
| HT4580D83-1 | 800 Grit Diamond ScrubPAD | ||||||
| HANDLES INTERCHANGEABLE WITH ALL HEADS |
VAT VALVE HEADS - FIXED | ||||||
HT5004 Grip & FT850 Handle |
FT830 VAT VALVE PM HEAD |
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| FT850 | 6" HANDLE | HT4528D84A-1 | 280 Grit Diamond ScrubPAD | ||||
| FT851 | 12" HANDLE | HT4528D85B-2 | |||||
| FT852 | 18" HANDLE | HT47830A-1 | UltraSOLV® Foam Wiper | ||||
| HT5004 | FOAM GRIP | HT47830B-2 | |||||
| HT57830A-1 | MiraWIPE® Over Foam | ||||||
| HT57830B-2 | |||||||
Scotch-Brite™ is a trademark of 3M Corporation
