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cleaning critical surfaces
PolyCHECK®
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| Description |
PolyCHECK® Wipers and Swabs are designed to allow engineers and technicians to validate the cleanliness of critical surfaces. PolyCHECK® Wipers are fabricated from a black fabric in order to enable the identification of white or opaque colored particles. PolyCHECK® Swabs employ a white fabric on one side and a black fabric on the other side in order to give clean room professionals a unique particle detection tool. Ideal when used in conjunction with SEM Analysis.
| Advantages |
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Eliminates the need to contact SEM stubs and tape to critical chamber surfaces. |
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Allows for faster analysis of particle sources during tool excursion events. |
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Perfect for defect analysis involving SEM stubs. |
| Applications |
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Ideal for Go/No Go validation checks in vacuum maintenance procedures. |
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Excellent general purpose cleanroom wiper for Semiconductor, Medical Device, FPD and Hard Disk Drive manufacturers. |
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PolyCHECK® Swabs enable frequent inspections to monitor for particles that may back scatter into process chambers. |
| Part Numbers |
| Part No. | Description | Size | Case Qty. |
| HT5291K-5 | PolyCHECK® Wiper | 9" x 9" | 5/Bag, 200 Bags/Cs |
| HT5291K | PolyCHECK® Wiper | 9" x 9" | 50/Bag, 24 Bags/Cs |
| HT1501FCW-5 | PolyCHECK® Swab | 6" Flexible Paddle Tip | 5/Bag, 100 Bags/Cs |
| HT1501FZW-5 | PolyCHECK® Swab | 6" Paddle Tip | 5/Bag, 100 Bags/Cs |
| HT1585FZW-5 | PolyCHECK® Swab | 5" Square Tip | 5/Bag, 100 Bags/Cs |
| Cleanliness Specifications |
Wiper |
Swab |
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| Particle Generation via LPC | >.5 micron |
>.5 micron |
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| >.3 micron particles/m2 | 1500 particles/cm2 |
<700 particles/tip |
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| Ion Count of Extractables | PPM |
Micrograms/Tip |
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Sulfate |
<.05 |
<.8 |
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Chloride |
<.05 |
<.9 |
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Fluoride |
<.02 |
<.02 |
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| Non-Volatile Residue (g/m2) | |||||
DI Water |
<.5 |
<.3 |
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IPA |
<1.5mg/g |
<1 |
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| Silicon/Amide Free | Pass |
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| Absorptive Capacity Specifications |
| Basis Weight (g/m2) | 120 |
| Absorbency (ml/m2) | 190 |
| Absorptive Rate (ml/g) | 3.2 |
cleaning critical surfaces
