cleaning critical surfaces
ScrubDISK® For Probe Cards
ScrubDISK® for Probe Card Cleaning leverages our industry-leading ScrubPAD abrasive cleaning technology, which over the past ten years has become the preferred method for cleaning vacuum process chambers in the Semiconductor and LCD industries. ScrubDISK® employs our patented abrasive technology that seats 5 micron Silicon Carbide abrasive crystals in a pre-laminated layer of epoxy. This allows the crystal to flex in order to make better, more complete contact with the tip and vertical surfaces of the pins. And, because the crystals are not premixed in the epoxy, the probe tip makes much less contact with the epoxy minimizing residue transfer to the tip. Finally the epoxy cushioning layer further minimizes crystal particle size non-uniformity resulting in safe, fast cleaning of probe tips. And to minimize the risk of PSA residue transferring to the pins the double-sided tape is recessed 4mm from the OD of the Mylar layer.
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| Silicon Carbide Crystal Slurry Layer | ||
Latex Layer |
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Cushion layer seats abrasive crystal and presents the probe pin with a more uniform SiC particle. |
| Mylar Layer |
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Value |
Tolerance |
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ScrubDISK® Thickness
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.3mm
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+/- 6% |
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Abrasive Layer Thickness
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.1mm
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+/- 5%
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Cushion/Epoxy Layer Thickness
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.076mm
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+/- 8%
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Mylar Sheet Thickness
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.025mm
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+/- 3%
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PSA Thickness
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.099mm
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+/- 6%
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Abrasive Sheet Diameter
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296mm
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+/- 5%
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Mylar Diameter
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292mm
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+/- 3%
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Crystal Particle Size
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5 Micron
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+/- 3%
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Part Number |
Description |
Packaging |
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HT45159C9G-1 |
296 mm ScrubDISK®, 5 Micron SiC Crystal (Mylar w/ PSA backing) |
1/Bag
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