Home > Documents > Datasheets > Scrubdisk For Probe Cards Datasheet

Click Here for Printer Friendly Version


cleaning critical surfaces

ScrubDISK® For Probe Cards


Description

ScrubDISK® for Probe Card Cleaning leverages our industry-leading ScrubPAD abrasive cleaning technology, which over the past ten years has become the preferred method for cleaning vacuum process chambers in the Semiconductor and LCD industries. ScrubDISK® employs our patented abrasive technology that seats 5 micron Silicon Carbide abrasive crystals in a pre-laminated layer of epoxy.

This allows the crystal to flex in order to make better, more complete contact with the tip and vertical surfaces of the pins. And, because the crystals are not premixed in the epoxy, the probe tip makes much less contact with the epoxy minimizing residue transfer to the tip.

Finally the epoxy cushioning layer further minimizes crystal particle size non-uniformity resulting in safe, fast cleaning of probe tips. And to minimize the risk of PSA residue transferring to the pins the double-sided tape is recessed 4mm from the OD of the Mylar layer.

Epoxy that will transfer to probe tip
Traditional coated abrasive surface ScrubDISK abrasive surface
SiC abrasive crystals for more complete probe tip cleaning.
Traditional Coated Abrasive


ScrubDISK®



F e a t u r e B e n e f i t
Unique three layer (substrate/cushion-epoxy layer/crystal layer) design

Probe tips make contact with only abrasive crystals minimizing transfer of Epoxy residue to the tip
Cushion resin layer allows abrasive crystal to flex to better conform to the shape of the probe tip Enables better cleaning of the vertical surfaces on the probe tip
Abrasive crystals are seated iceberg style in the epoxy layer Crystal shape and particle size uniformity is improved leading to more consistent cleaning results


Silicon Carbide Crystal Slurry Layer

Latex Layer
Silicon Carbide Crystal layer structure
Cushion layer seats abrasive crystal and presents the probe pin with a more uniform SiC particle.
Mylar Layer

S p e c i f i c a t i o n s
Value
Tolerance
ScrubDISK® Thickness
.3mm

+/- 6%

Abrasive Layer Thickness
.1mm
+/- 5%
Cushion/Epoxy Layer Thickness
.076mm
+/- 8%
Mylar Sheet Thickness
.025mm
+/- 3%
PSA Thickness
.099mm
+/- 6%
Abrasive Sheet Diameter
296mm
+/- 5%
Mylar Diameter
292mm
+/- 3%
Crystal Particle Size
5 Micron
+/- 3%

Part Number
Part Number
Description
Packaging
HT45159C9G-1

296 mm ScrubDISK®, 5 Micron SiC Crystal
(Mylar w/ PSA backing)
1/Bag