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UltraSOLV ScrubPAD®, ErgoSCRUB®
and ScrubDISK®



Description - ScrubPAD

UltraSOLV® ScrubPADS are patented scrubbing tools for use in PM procedures on process equipment in semiconductor, flat panel display, optical component and hard disk drive industries. The availability of various sized diamond, silicon carbide and aluminum oxide abrasives allow for safe and efficient scrubbing of the most difficult to clean process chambers. UltraSOLV® ScrubPADs, used in conjunction with UltraSOLV® Sponges, Wipers, and Swabs, reduce cleaning times, pump down times and contamination levels for critical process tools. UltraSOLV® ScrubDISKS® are the same patented material for use with ErgoSCRUB®.

Advantages
Foamtec Wide grit selection allows for quick removal of process-induced residue from aluminum, stain less steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear.
Foamtec The fiber-free construction of ScrubPADs greatly reduces particle levels in cleaned tools.
Foamtec By using washed abrasives, harmful ionic residues are minimized.
Foamtec Unique bonding technology minimizes the release of abrasive particles leading to cleaner PM procedures.
Foamtec Enables the elimination of H2O2 from PMs, which greatly reduces recovery times.
Foamtec Clean and unload with UltraSOLV® Sponge for longer life.

ScrubPAD Cleanliness
 
ScrubPAD Cleanliness
ScrubPAD Application Chart
Tool Category Tool Type ScrubPAD Part No. Comments
CVD TiN AMAT TxZ HT4580D-10 Can replace HT4536D-10 for tools that have lighter build-up
HT4536D-10 To replace H2O2 with DI H20 For view port, pump port, and slit valve cleaning.
HT4560S-10
HT4513PDS-10
HT4512PS-10
For Chamber wall, lid and sealing surfaces cleaning.
HT4528D-10 To remove stains from ceramic components.
CVD Metals AMAT WxZ & DxZ HT4560S-10 To replace H2O2
with DI H20
For cleaning of chamber surfaces.
HT4513PDS-10 For cleaning lid and sealing surfaces and to polish chamber wall.
Novellus, Prism & Altus HT4536D-10 or
HT4540S-10
To remove process stains from chamber wall and metal surfaces.
CVD Dielectric AMAT HDP, IMD, STI, and Producer HT4528D-10 To remove stains from ceramics with DI H2O.
HT4536D-10 Finishing pad for chamber surface and gas ring
HT4522DC3-1 or HT4528DC3-1 To remove hardened residue from ceramic domes in less than 2 hours
Novellus SPEED, SEQUEL& HDP HT4528D-10 or HT4536D-10 To remove stains from ceramics
Novellus Concept 1 + 2 &
PECVD & SPEED
HT4518-11 or HT4522-11 Allows 2 hour cleaning time for heater block
HT4528D-10 or HT4532D-10 or
HT4522DC3-1* or HT4528DC3-1*
Enables cleaning of ceramic parts & 1 hr. clean of heater block
Novellus Concept 1 + 2 &
PECVD & SPEED
HT4514DC3-1* Enables 30 min. cleaning of heater block dry and 45 min. cleaning wet
AMAT P5000 and Centura Nitride HT4540S-10 or HT4536D-10 Allows for 1 hour removal of Nitride-based residue
STI Etch AMAT DPS Metal HT4532D-10 Allows for quick removal of process residue from hard anodized upper chamber surfaces either dry or with DI H2O.
HT4528D-10 To remove process stains on ceramic dome
HT4560AS-10 To scrub SA Coat on upper chamber
Lam 4500 and AMAT P5000 HT4540-10 or HT4540A-10 To dry scrub chalk-like process residue
HT4536D-10 To dry scrub chalk-like residue in < 1½ hours
Metal Etch AMAT DPS HT4540S-10 or HT4560S-10 To remove process residue from hard anodized upper chamber with DI H2O.
HT4540AS-10 To remove process residue from soft anodized (SA Coat) on upper chamber
HT4528D-10 To remove process stains on ceramic dome
Poly Etch TEL Unity 2 DRM HT4512P-10 or HT4513PDS-10 Dry scrub to remove deposition from O-ring grooves and sealing surface upper chamber lid as well as to smooth out any scratches.
HT4580D-10 To remove process build-up with light scrubbing action.
AMAT DPS Poly / Lam 9400 HT4560S-10, HT4540S-10 or HT4513PDS-10 To remove brownish or rainbow-like stain from upper, lower, pedestal and view port sections of the chamber.
HT4580D-10 To remove process build-up with light scrubbing action.
Lam 9400 HT4580D-10 To remove blue rainbow and brown residue build-up with light scrubbing action.
Dielectric Etch LAM Exelan, 2300 Exelon™, & 2300 Versys™ HT4580D-10 To remove process build-up with light scrubbing action.
LAM 4520XLE HT4580D-10 To remove process build-up with light scrubbing action.
GaAs Etch Plasma-Therm
Versalock 700
HT4518S-10 To remove residue from ceramic and aluminum components with DI H2O in ½ hour.
HT4536D-10 To remove residue and smooth out rough finish of the ceramic ring with DI H2O in 15 min.
Implant -
Medium
Current / SDS
AMAT, Varian, Axcelis HT4528S-10 or HT4540S-10 To remove residue from source chamber, liners, and components with DI H2O.
HT4514DC3-1* or HT4518DC3-1* Enable quick removal of hardened residue from sources, source chambers lines
and beam lines.
HT4513PDS or HT4512PS-10 To polish source chamber, liners, and component. Also to clean source bushing.
Implant - High Current / SDS AMAT*, Varian, Axcelis HT4518S-10 or HT4522S-10 or
HT4514DC3-1* or HT-4518DC3-1*
To remove residue from source chamber, liners and components with DI H2O.
HT4513PDS or HT4512PS-10 To polish source chamber, liners, and components. Also to clean source bushing
HT4532D-10 or HT4514DC3-1*
or HT4518DC3-1*
To remove residue from source chamber, liners and components
HT4510S-10 or HT4528D-10 or
HT4514DC3-1* or HT4518DC3-1*
To remove extremely hard residue from beam line and MRS components
Implant - High Current / Solid Source, Indium and Germainium AMAT*, Varian, Axcelis HT4510S-10, HT4518S-10, HT4528D-10, HT4514DC3-1* or
HT4518DC3-1*
To remove residue from source chamber, liners and components with DI H2O.
HT4513PDS or HT4512PS-10 To polish source chamber, liners, and components. Also to clean source bushing
HT4510S-10 or HT4528D-10 To remove extremely hard residue from beam line and MRS components
*For use in conjunction with ErgoSCRUB® Hand Tool

Diamond ScrubPAD Family
Diamond ScrubPAD Family
White ScrubPAD
For ordering information, please
check out the Products Page of our website: www.foamtecintlwcc.com
ErgoSCRUB® and ScrubDISK®
ErgoSCRUB® is available with Pressure Sensitive Adhesive for the disposable handle and with Hook and Loop for easy replacement of the ScrubDISKs®, as pictured here.
ErgoSCRUB & ScrubDISK
If the Tool Category or Type you are looking for is not listed, please visit the Products page at www.foamtecintlwcc.com for more information or call 866.922.7160 ext. 6341 to have a sales engineer get in contact with you..

Description - ErgoSCRUB®

ErgoSCRUB® was designed to provide technician with a soft ergonomically correct scrubbing tool for Implant tools, ceramic domes, Novellus heater blocks, and large vacuum chambers. ErgoSCRUB® is also available in firm models to allow for quick and easy scrubbing on flat surfaces.


Advantages
Foamtec Easy to grip.
Foamtec Flexible enough to clean sphereical surfaces, such as domes. (FT900/FT901)
Foamtec Allows for uniform scrubbing action in order to minimize tool wear, such as dishing to heater blocks. (FT950/FT951)
Foamtec Enables faster cleaning of large tool surfaces.
Foamtec Available as a reusable or disposable tool with a variety of Diamond or Silicone Carbide ScrubPADs.

ErgoSCRUB® Applications

Technology Tool ErgoSCRUB® Part Number
CVD
AMAT & Novellus HDP Ceramic Domes
FT900 or FT901
CVD
Novellus Concept One and Two heater blocks
FT950 or FT951
Sputter & Evaporator
Shield and component scrubbing for AMAT, TEL, and Anelva Tools
FT900 or FT901
Etch
DPS Metal and Poly upper chambers
FT900 or FT901
Implant
AMAT, Axcelis, or Varian, source, beamline, MRS components and process chambers.
FT900 or FT901
Wafer
Silicon Reactor and EPI Chambers
FT900 or FT901
Memory Disk
Intevac 250B Sputter Bombs
FT900 or FT901
CMP
AMAT Reflexion and Mirra Mesa Cross and Shield Cleaning
FT900 or FT901


ErgoSCRUB® Products

ErgoSCRUB®
FT900 - Soft Handle - disposable : This model is meant for easy scrubbing of domes and other circular surfaces.
FT901 - Soft Handle with Loop Backing = Reusable
FT950 - Hard Handle: This model is meant for scrubbing flat surfaces.
FT951 - Hard Handle with Loop Backing = Reusable


ScrubDISKS®
Available ranging from 140 to 4000 grit Diamond, PSA (Pressure Sensitive Adhesive)
Available ranging from 140 to 4000 grit Diamond, Loop (For Easy Replacement)


Please check out the Products page of our website to find out ordering information for ScrubDISKS®.
cleaning critical surfaces
Scrubbing Hand