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UltraSOLV ScrubPAD®, ErgoSCRUB®
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| Description - ScrubPAD |
UltraSOLV® ScrubPADS are patented scrubbing tools for use in PM procedures on process equipment in semiconductor, flat panel display, optical component and hard disk drive industries. The availability of various sized diamond, silicon carbide and aluminum oxide abrasives allow for safe and efficient scrubbing of the most difficult to clean process chambers. UltraSOLV® ScrubPADs, used in conjunction with UltraSOLV® Sponges, Wipers, and Swabs, reduce cleaning times, pump down times and contamination levels for critical process tools. UltraSOLV® ScrubDISKS® are the same patented material for use with ErgoSCRUB®.
| Advantages |
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Wide grit selection allows for quick removal of process-induced residue from aluminum, stain less steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear. |
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The fiber-free construction of ScrubPADs greatly reduces particle levels in cleaned tools. |
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By using washed abrasives, harmful ionic residues are minimized. |
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Unique bonding technology minimizes the release of abrasive particles leading to cleaner PM procedures. |
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Enables the elimination of H2O2 from PMs, which greatly reduces recovery times. |
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Clean and unload with UltraSOLV® Sponge for longer life. |
| ScrubPAD Cleanliness |
| ScrubPAD Application Chart |
| Tool Category | Tool Type | ScrubPAD Part No. | Comments | ||
| CVD TiN | AMAT TxZ | HT4580D-10 | Can replace HT4536D-10 for tools that have lighter build-up | ||
| HT4536D-10 | To replace H2O2 with DI H20 | For view port, pump port, and slit valve cleaning. | |||
| HT4560S-10 HT4513PDS-10 HT4512PS-10 |
For Chamber wall, lid and sealing surfaces cleaning. | ||||
| HT4528D-10 | To remove stains from ceramic components. | ||||
| CVD Metals | AMAT WxZ & DxZ | HT4560S-10 | To replace H2O2 with DI H20 |
For cleaning of chamber surfaces. | |
| HT4513PDS-10 | For cleaning lid and sealing surfaces and to polish chamber wall. | ||||
| Novellus, Prism & Altus | HT4536D-10 or HT4540S-10 |
To remove process stains from chamber wall and metal surfaces. | |||
| CVD Dielectric | AMAT HDP, IMD, STI, and Producer | HT4528D-10 | To remove stains from ceramics | with DI H2O. | |
| HT4536D-10 | Finishing pad for chamber surface and gas ring | ||||
| HT4522DC3-1 or HT4528DC3-1 | To remove hardened residue from ceramic domes in less than 2 hours | ||||
| Novellus SPEED, SEQUEL& HDP | HT4528D-10 or HT4536D-10 | To remove stains from ceramics | |||
| Novellus Concept 1 + 2 & PECVD & SPEED |
HT4518-11 or HT4522-11 | Allows 2 hour cleaning time for heater block | |||
| HT4528D-10 or HT4532D-10 or HT4522DC3-1* or HT4528DC3-1* |
Enables cleaning of ceramic parts & 1 hr. clean of heater block | ||||
| Novellus Concept 1 + 2 & PECVD & SPEED |
HT4514DC3-1* | Enables 30 min. cleaning of heater block dry and 45 min. cleaning wet | |||
| AMAT P5000 and Centura Nitride | HT4540S-10 or HT4536D-10 | Allows for 1 hour removal of Nitride-based residue | |||
| STI Etch | AMAT DPS Metal | HT4532D-10 | Allows for quick removal of process residue from hard anodized upper chamber surfaces either dry or | with DI H2O. | |
| HT4528D-10 | To remove process stains on ceramic dome | ||||
| HT4560AS-10 | To scrub SA Coat on upper chamber | ||||
| Lam 4500 and AMAT P5000 | HT4540-10 or HT4540A-10 | To dry scrub chalk-like process residue | |||
| HT4536D-10 | To dry scrub chalk-like residue in < 1½ hours | ||||
| Metal Etch | AMAT DPS | HT4540S-10 or HT4560S-10 | To remove process residue from hard anodized upper chamber | with DI H2O. | |
| HT4540AS-10 | To remove process residue from soft anodized (SA Coat) on upper chamber | ||||
| HT4528D-10 | To remove process stains on ceramic dome | ||||
| Poly Etch | TEL Unity 2 DRM | HT4512P-10 or HT4513PDS-10 | Dry scrub to remove deposition from O-ring grooves and sealing surface upper chamber lid as well as to smooth out any scratches. | ||
| HT4580D-10 | To remove process build-up with light scrubbing action. | ||||
| AMAT DPS Poly / Lam 9400 | HT4560S-10, HT4540S-10 or HT4513PDS-10 | To remove brownish or rainbow-like stain from upper, lower, pedestal and view port sections of the chamber. | |||
| HT4580D-10 | To remove process build-up with light scrubbing action. | ||||
| Lam 9400 | HT4580D-10 | To remove blue rainbow and brown residue build-up with light scrubbing action. | |||
| Dielectric Etch | LAM Exelan, 2300 Exelon™, & 2300 Versys™ | HT4580D-10 | To remove process build-up with light scrubbing action. | ||
| LAM 4520XLE | HT4580D-10 | To remove process build-up with light scrubbing action. | |||
| GaAs Etch | Unaxis / Plasmatherm Versalock 700 |
HT4518S-10 | To remove residue from ceramic and aluminum components with DI H2O in ½ hour. | ||
| HT4536D-10 | To remove residue and smooth out rough finish of the ceramic ring with DI H2O in 15 min. | ||||
| Implant - Medium Current / SDS |
AMAT, Varian, Axcelis | HT4528S-10 or HT4540S-10 | To remove residue from source chamber, liners, and components with DI H2O. | ||
| HT4514DC3-1* or HT4518DC3-1* | Enable quick removal of hardened residue from sources, source chambers lines and beam lines. |
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| HT4513PDS or HT4512PS-10 | To polish source chamber, liners, and component. Also to clean source bushing. | ||||
| Implant - High Current / SDS | AMAT*, Varian, Axcelis | HT4518S-10 or HT4522S-10 or HT4514DC3-1* or HT-4518DC3-1* |
To remove residue from source chamber, liners and components | with DI H2O. | |
| HT4513PDS or HT4512PS-10 | To polish source chamber, liners, and components. Also to clean source bushing | ||||
| HT4532D-10 or HT4514DC3-1* or HT4518DC3-1* |
To remove residue from source chamber, liners and components | ||||
| HT4510S-10 or HT4528D-10 or HT4514DC3-1* or HT4518DC3-1* |
To remove extremely hard residue from beam line and MRS components | ||||
| Implant - High Current / Solid Source, Indium and Germainium | AMAT*, Varian, Axcelis | HT4510S-10, HT4518S-10, HT4528D-10, HT4514DC3-1* or HT4518DC3-1* |
To remove residue from source chamber, liners and components | with DI H2O. | |
| HT4513PDS or HT4512PS-10 | To polish source chamber, liners, and components. Also to clean source bushing | ||||
| HT4510S-10 or HT4528D-10 | To remove extremely hard residue from beam line and MRS components | ||||
*For use in conjunction with ErgoSCRUB® Hand Tool
Diamond ScrubPAD Family |
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| For ordering information, please check out the Products Page of our website: www.foamtecintlwcc.com |
ErgoSCRUB® and ScrubDISK® |
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ErgoSCRUB® is available with Pressure Sensitive Adhesive for the disposable handle and with Hook and Loop for easy replacement of the ScrubDISKs®, as pictured here. |
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| If the Tool Category or Type you are looking for is not listed, please visit the Products page at www.foamtecintlwcc.com for more information or call 866.922.7160 ext. 6341 to have a sales engineer get in contact with you.. | ||
| Description - ErgoSCRUB® |
ErgoSCRUB® was designed to provide technician with a soft ergonomically correct scrubbing tool for Implant tools, ceramic domes, Novellus heater blocks, and large vacuum chambers. ErgoSCRUB® is also available in firm models to allow for quick and easy scrubbing on flat surfaces.
| Advantages |
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Easy to grip. |
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Flexible enough to clean sphereical surfaces, such as domes. (FT900/FT901) |
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Allows for uniform scrubbing action in order to minimize tool wear, such as dishing to heater blocks. (FT950/FT951) |
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Enables faster cleaning of large tool surfaces. |
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Available as a reusable or disposable tool with a variety of Diamond or Silicone Carbide ScrubPADs. |
| ErgoSCRUB® Applications |
| Technology | Tool | ErgoSCRUB® Part Number |
CVD |
AMAT & Novellus HDP Ceramic Domes |
FT900 or FT901 |
| CVD |
Novellus Concept One and Two heater blocks | FT950 or FT951 |
Sputter & Evaporator |
Shield and component scrubbing for AMAT, TEL, and Anelva Tools |
FT900 or FT901 |
Etch |
DPS Metal and Poly upper chambers |
FT900 or FT901 |
Implant |
AMAT, Axcelis, or Varian, source, beamline, MRS components and process chambers. |
FT900 or FT901 |
Wafer |
Silicon Reactor and EPI Chambers |
FT900 or FT901 |
Memory Disk |
Intervac 250B Sputter Bombs |
FT900 or FT901 |
CMP |
AMAT Reflexion and Mirra Mesa Cross and Shield Cleaning |
FT900 or FT901 |
| ErgoSCRUB® Products |
ErgoSCRUB®
FT900 - Soft Handle - disposable : This model is meant for easy scrubbing of domes and other circular surfaces.
HT901 - Soft Handle with Loop Backing = Reusable
FT950 - Hard Handle: This model is meant for scrubbing flat surfaces.
FT951 - Hard Handle with Loop Backing = Reusable
ScrubDISKS®
Available ranging from 140 to 4000 grit Diamond, PSA (Pressure Sensitive Adhesive)
Available ranging from 140 to 4000 grit Diamond, Loop (For Easy Replacement)
Please check out the Products page of our website to find out ordering information for ScrubDISKS®.
cleaning critical surfaces
