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UltraSOLV® ScrubTIP®


Description

UltraSOLV® ScrubTIPs® are unique cleaning tools that combine Foamtec International's Swab and ScrubPAD technology. Using washed Diamond or Silicon Carbide abrasives and proprietary bonding methods, ScrubTIPs® are perfect for polishing stains, scratches and process-induced residue from hard-to-clean surfaces.

Advantages
Foamtec Available in a variety of shapes, sizes, and grits to scrub tool corners, o-ring grooves, detector ports and other hard-to-reach areas.
Foamtec Available in sharp tip configurations with fine abrasives for removing residue from ESCs (Electrostatic Chucks).
Foamtec The unique bonding methods allow for aggressive scrubbing required for Implant Source components, AMAT HDP chambers and Novellus heater blocks.
Foamtec Perfect for replacing Scotch-Brite™ and screw drivers for o-ring groove and chamber corner areas.
Foamtec Enables in-site polishing of scratches from sealing surfaces.

HT179060-5 scrubtip grey paddle
HT174880-5 SM Gry Point Tip
Scrubtip Wht Point Tip
HT179060-5 (2) SM GREY Roundtip
Available in a variety of shapes, sizes, and grits to scrub tool corners, o-ring grooves, detector ports and other hard-to-reach areas. See Application Chart on back.


cleaning critical surfaces
UltraSOLV® Chamber Cleaning ScrubTIPs®
For more information, please contact Customer Service at 866.922.7160 ext. 6341.

Legend: SiC = Silicon Carbide D = Diamond
Part No. Shown Avail. Grits Available Part No. Usage Description
HT179060-5 scrubtip grey paddle HT170060-5
600 grit SiC		 N/A HT170060-5
To scrub large detector ports, view ports, o-ring grooves and vertical step downs on heater assemblies and ESCs.
HT174880-5 SM Gry Point Tip HT174880-5
800 grit SiC		 280 grit SiC HT174828-5
To scrub stubborn residue build-up from CVD and Etch system detector ports.
600 grit SiC HT174860-5
To polish light scratches from sealing surfaces.
800 grit SiC HT174880-5
To polish scratches from o-ring grooves and other sealing surfaces.
1350 grit D HT174813PD-5
To remove residue from o-ring groove and other sealing surfaces.
HT174913PD-5 Wht Point Tip HT174913PD-5
1300 grit D		 600 grit SiC HT174960-5
To clean residue from o-ring grooves, ESCs and ceramic chucks.
800 grit SiC HT174980-5
To polish light scratches from sealing surfaces.
1350 grit D HT174813PD-1
To scrub corners, grooves and gas ports. Also to remove residue from the edges of ESCs in Etch tools. To scrub residue from the perimeter of GPDs in CVD tools and corners in PVD and evaporator systems.
HT179060-5 (2) SM GREY Roundtip HT179060-5
600 grit SiC		 180 grit D HT179018D-5
For heavy duty scrubbing of Implant Source chamber corners, Turbo pump ports and Novellus fork grooves.
280 grit D HT179028D-5
For heavy duty scrubbing of Implant Source chamber corners, Turbo pump ports and Novellus fork grooves.
280 grit SiC HT179028-5
For heavy duty scrubbing of Implant Source chamber corners, Turbo pump ports and Novellus fork grooves.
360 grit D HT179036D-5
For heavy duty scrubbing of Implant, Etch, and CVD systems. Especially useful for detector ports, Implant Source chamber corners and Novellus fork grooves.
400 grit SiC HT179040-5
A general purpose scrubbing tool for CVD, Etch and Implant chambers.
600 grit SiC HT179060-5
To clean corners in LAM, AMAT, TEL and Plasma-Therm Etch systems.
800 grit SiC HT179080-5
To scrub o-ring grooves and corners in Implant Source and Process chambers.
800 grit D
 HT179080D-1
For heavy duty scrubbing of o-ring grooves and corners in Implant Source and Process chambers.
Depending on volume, custom-made ScrubTIP®s are available in various swab tips and grits ranging from 100 to 1500 grit Silicon Carbide, 100 to 4000 grit Aluminum Oxide and 100 to 4000 grit Diamond. Please contact your Regional Sales Engineer or info@foamtecintlwcc.com for more information.

Scotch-Brite™ is a trademark of 3M Corporation