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Important Safety Information

URGENT! IMMEDIATE ATTENTION REQUIRED

WARNING!

Use of Oxidizers such as Hydrogen Peroxide (H2O2) or Flammable Liquids such as Isopropyl Alcohol in Dopant Contaminated Parts Cleaning will Increase the Risk of fires and/or the Release of Hazardous Chemical Fumes, Potentially resulting in Personal Injury and Property Damage!

Oxidizers such as Hydrogen Peroxide (H2O2) will react with dopant contamination, releasing Toxic Oxides of dopant materials such as Arsenic, Antimony, Phosphorus, etc. Phosphorus contamination, in particular, is flammable and may be ignited by heat, friction, or an incidental spark caused by metal parts striking each other. H2O2 is a strong oxidizer and will react with phosphorus, potentially causing it to ignite. Flammable Liquids such as Isopropyl Alcohol (IPA) will also be ignited in the event of phosphorus ignition, increasing the severity of the fire and risk of personal injury and property damage.

In order to reduce the risk of fires and potential hazardous chemical exposures while cleaning dopant contaminated parts, Foamtec LLC STRONGLY RECOMMENDS that the following actions be taken:

CUSTOMER ACTIONS:

  1. Train Equipment Maintenance Personnel on the Hazards of dopant contaminants on implanter parts. Particular emphasis should be placed on the Flammability of Phosphorus and Health Effects of Arsenic, including its Carcinogenicity.
  2. Clean dopant contaminated metal parts ONLY BY “WET SCRUBBING” USING DEIONIZED (DI) WATER AND AN ABRASIVE PAD. It is recommended that wet scrubbing must always be done using either local exhaust ventilation or appropriate respiratory protection. Dopant Contaminated metal parts must NEVER be scrubbed DRY! This will increase the Risks of Fire and Exposure to Hazardous Particulates!
  3. Minimize the use of Combustible Materials in and around areas where potentially Phosphorus contaminated equipment is handled.
  4. Develop maintenance procedures incorporating these recommendations and update any existing written procedures to comply with your newly developed procedures.
  5. Train maintenance personnel in the use of your newly developed procedures.