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Compund Semiconductor

  • Foamtec Enables Compound Semiconductor Fabs to improve PM Procedures for plasma etch, PVD and CVD tools.
  • Advance Vacuum Chamber cleaning tools enable Compound Semiconductor Fabs to reduce downtime on Reactive Ion etch tools
  • Compound Semiconductor Techs can quickly remove heavy process residue from Reactive Ion Etch Chambers and ceramic components.

Foamtec is the leading manufacturer of Vacuum chamber cleaning products that enable equipment engineers to return dry etch, sputter and CVD tools back to production in less time and with fewer post PM particles. For the past 15 years engineers in Compound Semiconductor fabs running GaAs, InP, AiN, SiC and GaN processes have used Foamtec's ScrubPADS, UltraSOLV Sponges and MiraWIPES to improve Vacuum Chamber PM procedures.

For More information on how to more quickly PM Plasma-Therm, Oxford Instruments and STS vacuum chambers to production please feel free to contact us