Flat Panel Display
Foamtec's WCC Division offers Plasma Display, LCD and OLED manufacturing facilities unique solutions to difficult cleaning problems.
In LCD and OLEDOLED UltraSOLV® Vacuum Chamber Cleaning Products eliminate Scotch-Brite™ and commercial grades of sand paper in PM procedures for TEL, Ulvac, and AKT process chambers. Be it CVD, PVD or Etch chambers, ErgoWRENCH® , ErgoSCRUB® and ScrubWRIGHT® combined with ScrubPAD, ScrubDISK® and ScrubBELT® offer production proven performance to remove process residues in less time, with less cost and damage to critical Vacuum Chamber Components.
Cleaning Resist Coating Equipment is a major source of downtime for which we have developed unique cleaning solutions. Click here to learn more about how to improve TOK resist coater uptime and particle levels.
Tokyo Electron Etch tools pose considerable cleaning issues to Equipment Engineers and Technicians. Click here to see the latest cleaning techniques for RIE Etch tools in 5th, 6th and 7th generation LCD fabs
Cleaning Doctor Rollers in LCD lines is a particular challenge. PilloWIPE® with proprietary PE foam enables scratch-free wiping with solvents such as NMP to reduce costly downtime of coating tools.
Scotch-Brite™ is a trademark of 3M Corporation