Tokyo Ohka Kogyo(TOK) Resist Coater
|Pre PM-Heavy Hardened Resist Residue||Post PM-Cleaned To Bare Metal|
|Typical Condition of Top Plate Pre PM||Top Plate Free of hardened PR Post PM|
Cleaning hardened photo resist(PR) from resist coaters has always been a challenge in FPD fabs but with the advent of Gen 5, 6 and 7 substrates the problem has been amplified. Now for the first time engineers have a viable cleaning method to remove hardened PR residue.
TOK Resist Coater PM Cleaning Kit Enables:
Reduced Top Plate PM Times
Eliminates Resist Peeling Defects And Expensive Outsourcing of Top Plate
Reduced Particle Defects