Tokyo Ohka Kogyo(TOK) Resist Coater
| Pre PM-Heavy Hardened Resist Residue | Post PM-Cleaned To Bare Metal |
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| Typical Condition of Top Plate Pre PM | Top Plate Free of hardened PR Post PM |
Cleaning hardened photo resist(PR) from resist coaters has always been a challenge in FPD fabs but with the advent of Gen 5, 6 and 7 substrates the problem has been amplified. Now for the first time engineers have a viable cleaning method to remove hardened PR residue.
TOK Resist Coater PM Cleaning Kit Enables:
Reduced Top Plate PM Times
Eliminates Resist Peeling Defects And Expensive Outsourcing of Top Plate
Reduced Particle Defects
