Semiconductor Manufacturing

Semiconductor manufacturing places huge demands on engineers to maximize productivity and control particle related defects. Foamtec's range of Vacuum Chamber Cleaning Products enable advanced 200MM and 300MM Fabs to maximize tool uptime while reducing post PM particle levels.

Semiconductor Manufacturers running older wafer fabs can achieve much higher levels of productivity by reducing PM times, extending MTBC and reducing Tech labor inputs.

Since 1997 Wafer Fab Equipment and Process Engineers responsible for Etch, EPI, CVD, PVD, RTP, Implant, PECVD, Photo/track, Strip, Diffusion and CMP tools have adopted our Vacuum Chamber Cleaning Products to improve equipment PM procedures. Vacuum Chamber Cleaning Products and Procedures have been designed to eliminate the following PM Problems:

Scotch-Brite™ Related Particle and Metal Contamination
Commercial sand paper related contamination
H₂O₂ related safety and recovery time issues
Non Absorbent clean room wiper related Post PM residue

Application Notes / Training Guides

Vacuum Chamber Cleaning Products that enable technicians to bring chambers back to like-new condition.

By using our proven Vacuum Chamber Cleaning Products and protocols, Wafer Fab Engineers have the opportunity to improve Process Parameters by means of:

Improved post PM Particle Counts
Reduction of Vacuum Chamber Cleaning Times
Reduction of Vacuum Chamber Recovery Times
Reduction of PM Generated Hazardous Waste
Cost of Ownership

Select from the following to view specific Vacuum Chamber PM procedures:

The cheaper and easier way to clean your Vacuum Chambers. Video	See how to maximize the cleanliness of Vacuum Chambers and components. Video	How clean is your Vacuum Chamber? Video	O-Ring Groove, Screw thread, and Port Cleaning Video
Metal Etch PM Video			Endura PVD DeGas Chamber PM Video

The Foamtec International Sales/Application Engineering Staff has worked closely with the leading Tool Manufacturers and wafer fab professionals, to develop a High Precision Vacuum Chamber PM Technique that drives improved tool performance and reduced cost of ownership. Our fab experience and working directly with our customers allowed us to develop tools used for many different special applications to help meet their objectives. We have a world wide network of factory trained engineers to support our customers.

Foamtec's HIGH PRECISION Vacuum Chamber PM TECHNIQUE Eases Cleaning of 200MM and 300MM Vacuum Chamber Equipment

Scotch-Brite™ is a trademark of 3M Corporation