AMAT Ultima HDP Pm
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| AMAT Ultima HDP Dome Pre PM | HDP ceramic domes can be cleaned in place in < than 1 hour. Tool downtime, test wafers and post PM partilces are dramatically reduced vs current off tool PM methods. |
AMAT HDP Dome Post PM |
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HDP Chamber Scrub | (picture not available) |
Vacuum Chamber Cleaning Products are designed to give AMAT HDP Engineers the ability to improve PM Protocols, and give our customers the opportunity to reduce Cost & Mean Time to Clean (MTTC) while improving Tool Availability.
- Procedures designed to clean AMAT Ceramic Domes in place, dramatically reducing tool down time and component cleaning costs.
- Eliminating the use of Scotch-Brite™ to clean AMAT HDP Chambers, dramatically reducing particles and tool recovery time.
- Cleaning tools specially designed for slit valves, quartz view ports, pump ports, shower heads, and O-ring Grooves.
- Final cleaning procedures to reduce recovery time and particle levels.
Contact Us for a faster, easier PMAMAT 300 XGEN Application Note
IMPORTANT SAFETY INFORMATION
Product Application Chart
Other Application Notes and Training Guides
Scotch-Brite™ is a trademark of 3M Corporation