AMAT Ultima HDP Pm
|AMAT Ultima HDP Dome Pre PM||
HDP ceramic domes can be cleaned in place in < than 1 hour.
Tool downtime, test wafers and post PM partilces are dramatically reduced vs current off tool PM methods.
|AMAT HDP Dome Post PM|
|HDP Chamber Scrub||(picture not available)|
Vacuum Chamber Cleaning Products are designed to give AMAT HDP Engineers the ability to improve PM Protocols, and give our customers the opportunity to reduce Cost & Mean Time to Clean (MTTC) while improving Tool Availability.
- Procedures designed to clean AMAT Ceramic Domes in place, dramatically reducing tool down time and component cleaning costs.
- Eliminating the use of Scotch-Brite™ to clean AMAT HDP Chambers, dramatically reducing particles and tool recovery time.
- Cleaning tools specially designed for slit valves, quartz view ports, pump ports, shower heads, and O-ring Grooves.
- Final cleaning procedures to reduce recovery time and particle levels.
Scotch-Brite™ is a trademark of 3M Corporation