Novellus Chemical Vapor Deposition Cleaning
FWCC's Vacuum Chamber Cleaning Products, kits and Application notes are used throughout the semiconductor industry to safely, thoroughly and quickly remove process residue from Novellus Chemical Vapor Deposition tools. Equipment engineers from 150MM to 300MM fabs recognize the ability of our products to produce the following results:
- Reduce scrubbing and cleaning time and the associated labor involved with wet cleans
- Post PM particle reductions
- Improved tool Uptime and availability
- Improved Cost of Ownership
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C3 Speed Dome Clean |  |
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Concept 2 PM With Heater Block |  |
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Speed 2 Dome |  |
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Shower Heads |  |
Application Notes / Training Guides