Novellus HDP Chemical Vapor Deposition Speed Dome Cleaning Products
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Vacuum Chamber Cleaning Products are designed to give Novellus HDP Engineers the ability to improve PM Protocols, and give our customers the opportunity to reduce Cost & Mean Time to Clean (MTTC) while improving Tool Availability.
ADVANTAGES
- Procedures designed to clean Novellus SPEED 2 and Novellus SPEED 3 Ceramic Domes in place, dramatically reducing tool down time and component cleaning costs.
- Eliminating the use of Scotch-Brite™ to clean Novellus SPEED Chambers dramatically reducing particles and tool recovery time.
- Cleaning tools specially designed for slit valves, quartz view ports, pump ports, shower heads, and O-ring Grooves.
- Final cleaning procedures to reduce recovery time and particle levels
- Procedures designed to clean AMAT and Novellus HDP, ceramic domes in place, dramatically reducing tool down time and component cleaning costs.
- Cleaning tools specially designed for slit valves, quartz view ports, pump ports, shower heads, and O- ring Grooves.
- Procedures to eliminate Scotch-Brite™ and the SAFETY HAZARDS of using H2O2 from AMAT TxZ and WxZ wet strips, significantly improving tool availability.
- Procedures and kits to dramatically reduce the cleaning time associated with removing process deposition from Novellus C1 and C2 heater blocks.
Scotch-Brite™ is a trademark of 3M Corporation
