AMAT Ultima HDP Pm

For the first time, wet cleans without H₂O₂ or Scotch-Brite™ and sub 10 hour green to green times!

Pre PM

Post Clean

HOW?

Wxz/WxP Chamber Application Note

WxP Buffer Application Note

UltraSOLV® ScrubPADs are patented scrubbing tools for use in PM procedures on process equipment in semiconductor, flat panel display, optical component and hard disk drive industries. The availability of various sized diamond, silicon carbide and aluminum oxide abrasives allow for safe and efficient scrubbing of the most difficult to clean process chambers. UltraSOLV® ScrubPADs, used in conjunction with UltraSOLV® Sponges, Wipers, and Swabs, reduce cleaning times, pump down times and contamination levels for critical process tools.

Cleaner Tool
Faster Clean
More Efficient Clean

Application Notes / Training Guides
IMPORTANT SAFETY INFORMATION
Product Application Chart

Scotch-Brite™ is a trademark of 3M Corporation