Varian VIIsion 80 Source
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| Varian VIIsion 80 Source Pre PM with Heavy Process Residue | Varian VIIsion 80 Source Post PM to Bare Metal w/o H2O2 & Scotch-Brite™ |
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Varian VIISion 80 Source Chamber Clean Application Note
When it comes to Implant PM's Engineers and Techs are often faced with the dilemma of risk. Risks associated with PM generated particles, H2O2 related safety issues as well as lengthy and unpredictable recovery times. In short, the question is often "Should we even PM the tool?"Our Vacuum Chamber Cleaning Product Line backed, up by our experienced Applications Specialists, can demonstrate PM protocols that provide the following benefits:
- Elimination of Scotch-Brite™ generated Fibers and particles
- Elimination of the safety and recovery time issues associated with H2O2
- Reduced tech time to complete PM's.... all the way to bare metal tool surfaces
- Greatly reduced recovery times especially on large process chambers
- Improved particle performance
Click here to contact us about how to eliminate the high costs and risks associated with Implant PM's
Scotch-Brite™ is a trademark of 3M Corporation
