Varian VIISta 810 Source Cleaning
| Varian VIISta 810 Source Pre PM | Varian VIISta 810 Source Post PM |
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Varian VIISta 810 Source Cleaning Training Guide
Source PM's can now be completed in less than 45 minutes w/o Scotch-Brite™ and H2O2 enabling dramatic improvements in particle performance and equipment uptime
Our Vacuum Chamber Cleaning Product Line backed, up by our experienced Applications Specialists, can demonstrate PM protocols that provide the following benefits:
- Elimination of Scotch-Brite™ generated Fibers and particles
- Elimination of the safety and recovery time issues associated with H2O2
- Reduced tech time to complete PM's.... all the way to bare metal tool surfaces
- Greatly reduced recovery times especially on large process chambers
- Improved particle performance
Click here to contact us about how to eliminate the high costs and risks associated with Implant PM's
Scotch-Brite™ is a trademark of 3M Corporation