Varian VIISta HC Process Chamber Door
| Varian VIISta HC Process Chamber Door Pre-Clean | Varian VIISta HC Process Chamber Door Post-Clean | |
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| Varian VIISta HC Process Chamber Application Note | ||
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Varian Process Chamber Door Video (Video may take a little longer to load) |
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Varian VIISta HC Process Chamber Door can be cleaned down to bare metal w/o Scotch-Brite™ and H2O2. When it comes to Implant PM's Engineers and Techs are often faced with the dilemma of risk. Risks associated with PM generated particles, H2O2 related safety issues as well as lengthy and unpredictable recovery times. In short, the question is often "Should we even PM the tool?"
Our Vacuum Chamber Cleaning Product Line backed, up by our experienced Applications Specialists, can demonstrate PM protocols that provide the following benefits:
- Elimination of Scotch-Brite™ generated Fibers and particles
- Elimination of the safety and recovery time issues associated with H2O2
- Reduced tech time to complete PM's.... all the way to bare metal tool surfaces
- Greatly reduced recovery times especially on large process chambers
- Improved particle performance
Click here to contact us about how to eliminate the high costs and risks associated with Implant PM's
Scotch-Brite™ is a trademark of 3M Corporation