Electrostatic Chuck Cleaning
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Foamtec International has developed an improved cleaning technique to safely remove process residue from electrostatic chucks.
Customers are currently using cleaning methods that do not efficiently remove process residue. This causes backside helium leaks leading to extended tool downtime.
Problem:
Current Cleaning Method: Scotch-Brite™
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Current Cleaning Method: Ceramic Scrapers
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Solution:
Foamtec International offers superior cleaning techniques proven to safely remove process residue from e-chuck edge and surface areas.
ScrubPAD Product Details
Superior Cleaning Technique: UltraSOLV ScrubPAD
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ScrubWRIGHT Product Details
Superior Cleaning Technique: ScrubWRIGHT Pen
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ScrubTIP Product Details
Superior Cleaning Technique: ScrubTIP
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MiraSWAB Product Details
Superior Cleaning Technique: MiraSWAB
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Contact Foamtec International for an appoved AMAT SLTESC Edge Cleaning Guide
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Advantages:
- Safely removes process residue
- Reduces helium leaks
- Reduces defects
- Reduces electrostatic clamping issues
- Extends MTTC (mean time to clean)
- Reduces metal contaminants
- Prevents damage to chuck surface
- Extends chuck life
Contact Foamtec International for a demonstration
Scotch-Brite™ is a trademark of 3M Corporation