Electrostatic Chuck Cleaning
Foamtec International has developed an improved cleaning technique to safely remove process residue from electrostatic chucks.
Customers are currently using cleaning methods that do not efficiently remove process residue. This causes backside helium leaks leading to extended tool downtime.
Current Cleaning Method: Scotch-Brite™
Current Cleaning Method: Ceramic Scrapers
Foamtec International offers superior cleaning techniques proven to safely remove process residue from e-chuck edge and surface areas.
Superior Cleaning Technique: UltraSOLV ScrubPAD
Superior Cleaning Technique: ScrubWRIGHT Pen
Superior Cleaning Technique: ScrubTIP
Superior Cleaning Technique: MiraSWAB
Contact Foamtec International for an appoved AMAT SLTESC Edge Cleaning Guide
- Safely removes process residue
- Reduces helium leaks
- Reduces defects
- Reduces electrostatic clamping issues
- Extends MTTC (mean time to clean)
- Reduces metal contaminants
- Prevents damage to chuck surface
- Extends chuck life
Contact Foamtec International for a demonstration
Scotch-Brite™ is a trademark of 3M Corporation