Electrostatic Chuck Cleaning
ScrubWRIGHT™ Safely Cleans Electrostatic Chucks
A unique tool for cleaning small, hard to reach areas. Interchangeable belt-shaped Diamond ScrubBELTS® in various grits create a versatile instrument perfect for polishing stains, scratches and process-induced residue from scratch sensitive surfaces. Spring adjustable for easy mounting and rotation of ScrubWRIGHT™ ScrubBELT™.
ADVANTAGES
- Improved Cost Of Ownership “Coo”
- Helps Reduce Particles
- Safely Removes Deposition From Sensitive Areas
- Reduces Damage To Critical Parts
FTPEN-1 with HT4536DW-5 ScrubBELT™
