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Lam 9600 Metal Etch Wet Cleans

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LAM 9600 Etch Chamber Pre Wet Clean LAM 9600 Etch Chamber Post Wet Clean

Super Clean

Eliminate Scotch-Brite™ related particles

Reduce PM times by 30%

Turbo Tunnel

Reduce Tool Recovery time

VAT Valve Clean

Clean Hard to reach Areas

Scotch-Brite™ is a trademark of 3M Corporation