LAM Etch Wet Cleans
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LAM Etch Wet Cleans can now be accomplished with much less tech time and tool down time with PM tools that allow for the complete and safe removal of process residue from critical areas of the process chamber. For example, ScrubWRIGHT™ enables techs to safely clean unwanted process deposition from critical areas around ESC and eliminate flaking particles with the ScrubWRIGHT™ FTPEN-1
| 2300 Exelan | 2300 Versys | 4500 | 9400 Poly Etch | 9600 Conductor Etch |
| View Metal Etch PM Video |