Plasma-Therm Etch Cleaning
Plasma-Therm Reactive Ion Etch Equipment Can Be Cleaned Much More Quickly With Reduced Post PM Particles
Plasma-Therm Etch Tools Cleaned Faster
Plasma-Therm Ceramic Spools Cleaned & Polished in Under 30 Minutes
Plasma-Therm PM's Acheived With Reduced Particles & Recovery Times
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| Plasma-Therm Ceramic Spool Pre PM | Plasma-Therm Ceramic Spool Post PM | Plasma-Therm Ceramic Clamp Ring Pre PM | Plasma-Therm Ceramic Clamp Ring Post PM |
Foamtec PM Kits reduce the cost, time and post PM particles issues so often associated with PM procedures on Plasma-Therm RIE Tools. UltraSOLV® High Precision PM Kits (listed below) and cleaning procedure for the ceramic spool, electrode and metal portions of Versalok and VERSALINE chambers. The kit contains UltraSOLV® Diamond ScrubPADS, Sponges and Wipers that enable the following benefits:
- Quick, thorough wiping of the ceramic spool even when it has been etched
- Polish and cleaning of the ceramic spool in less than 15 minutes
- Scrubbing and cleaning of the electrode assembly in less than 15 minutes
- Complete chamber PM in less than an hour
- Achieve pump down to bases vacuum in 30-40% less time than with standard PM cleaning