Plasmatherm Etch Wet Cleans
Plasmatherm Reactive Ion Etch Equipment Can Be Cleaned Much More Quickly With Reduced Post PM Particles
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| Ceramic Spool Pre PM | Ceramic Spool Post PM | Ceramic Clamp Ring Pre PM | Ceramic Clamp Ring Post PM |
Foamtec PM Kits reduce the cost, time and post PM particles issues so often associated with PM procedures on Plasmatherm RIE Tools. UltraSOLV® High PrecisionPM Kits (listed below) and cleaning procedure for the ceramic spool, electrode and metal portions of Versalok and VERSALINE(TM/Oerlikon) chambers. The kit contains UltraSOLV® Diamond ScrubPADS, Sponges and Wipers that enable the following benefits:
- Quick, thorough wiping of the ceramic spool even when it has been etched
- Polish and cleaning of the ceramic spool in less than 15 minutes
- Scrubbing and cleaning of the electrode assembly in less than 15 minutes
- Complete chamber PM in less than an hour
- Achieve pump down to bases vacuum in 30-40% less time than with standard PM cleaning
