Silicon Etching presents Equipment Engineers with challenging PM issues related to the need to clean heavy process induced residue from the etch chamber. Traditional use of Scotch-Brite™ and clean room wipers lead to high post PM particle levels and prolonged equipment downtime.
Foamtec's Vacuum Chamber Cleaning Products make Scotch-Brite™ related particle issues, long scrubbing times and extended down time a thing of the past. In today's ultra competitive environment Device Makers need the highest productivity levels to meet ever tighter cost targets. Foamtec's High Precision PM kits bring lean manufacturing techniques to equipment maintenance.
|STS Silicon Etch tools Cleaned With Foamtec High Precision PM Kits Can Be Returned to Like New Condition in Much Less Time|
|Traditional Cleaning SOP's Leave Process Residue Causing Long Recovery Times and Create Scotchbrite Related Particle Issues||Foamtec's Vacuum Chamber Cleaning Kits Eliminate Scotch-Brite™ and Return Chambers to Like New Condition|
If you want to move away from 1980's PM techniques please feel free to click here to contact us
Scotch-Brite™ is a trademark of 3M Corporation