Roth and Rau PECVD Cleaning

Roth & Rau PECVD Cleaning no longer needs to be a major cause of tool down time and lost production


Roth & Rau PECVD Chamber heavily coated with SiNx process residue	Roth & Rau PECVD door section after being Scrubbed with Diamond ScrubDISK® and UltraSOLV® Sponge	Roth & Rau PECVD door section after being cleaned with MiraWIPE®

Roth & Rau PECVD Chamber Cleaning can be accomplished much more quickly ensuring greater uptime and with much less labor for lower costs.

Roth & Rau PECVD Cleaning operations can be greatly shortened by the use of UltraSOLV® Chamber Cleaning products which are designed to remove CVD SiNx process residue from door sections.