Vacuum Chamber Cleaning - ErgoSCRUB®
ErgoSCRUB® was designed to provide technicians with a soft, ergonomically-correct, scrubbing tool to remove process residue from vacuum chambers used in CVD, PECVD, PVD, Sputtering, Plasma Etch, RIE and Ion Implant Processes in the Semiconductor, LCD, Solar Cell, Optics and Hard Disk Drive industries.
- Easy to Grip
- Flexible enough to clean spherical surfaces, such as domes. (FT900/FT901)
- Allows for uniform, scrubbing action in order to minimize tool wear, such as dishing to heater blocks. (FT950/FT951)
- Enables faster cleaning of large, vacuum chamber tool surfaces.
- Available as a reusable or disposable tool with a variety of Diamond or Silicone Carbide ScrubDISKS®.
ErgoSCRUB® is available with Pressure Sensitive Adhesive for the disposable handle and with Hook and Loop for easy replacement of the ScrubDISKS®, as pictured.