Vacuum Chamber Cleaning Abrasive ScrubDISKS®

Vacuum Chamber Cleaning w/o Scotch-Brite™

Vacuum Chamber ScrubDISKS® Clean Process Residue

Datasheet
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Variety of Grits Available

ErgoSCRUB® with ScrubDISK®
Vacuum Chamber UltraSOLV® ScrubDISKS® are patented scrubbing tools for use in PM procedures on process equipment in Wafer Fab, flat panel display, optical component and hard disk drive industries.

VACUUM CHAMBER ScubDISKS® ADVANTAGES

  • Wide grit selection allows for quick removal of process-induced residue from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear.
  • The fiber-free construction of ScrubDISKS® greatly reduces particle levels in cleaned Vacuum Chambers.
  • By using washed abrasives, harmful ionic residues are minimized.
  • Unique bonding technology minimizes the release of abrasive particles leading to cleaner Vacuum Chamber PM procedures.
  • Enables the elimination of H2O2 from PMs, leading to greatly reduced recovery times.

 

 

Choose the Right Abrasive For Your Tool

Don't Waste Product ScrubBELTS™, ScrubPADS ScrubDISKS® can be reused. SEE HOW. ««Video

What is the size of the diamond crystal used to make my ScrubDISK®?

Vacuum Chamber Cleaning ScrubDISK® Catalog

  • Vacuum Chamber Cleaning ScrubDISKS® remove hardened process residue from Hi vacuum chambers used to process semiconductors, LCD panels, magnetic media, GMR heards, Optics, Solar Cells and MEMS Device.
  • Vacuum Chamber Cleaning ScrubDISKS® are fiber free so are an ideal replacement for Scotch-Brite™.
For use in conjunction with ErgoSCRUB® Hand Tool. Available with Pressure Sensitive Adhesive for the disposable handle and with Hook and Loop for easy replacement of the ScrubDISK® as pictured here.
Part Number

Picture
(Click for dimension details)

 Description
HT4514DC3 140 Grit Diamond ScrubDISK Vacuum Chamber Cleaning ScrubDISKS® with 140 Diamond grit abrasive particles for very heavy duty PM procedures. Ideal for cleaning very hard legacy process residue from Ion Implant, Novellus and AMAT HDP CVD and Roth and Rau SiNX CVD tools.
HT4518DC3 180 Grit Diamond ScrubDISK Vacuum Chamber Cleaning ScrubDISKS® with 180 Diamond grit abrasive particles for heavy duty PM procedures. Ideal for Ion Implant, Novellus and AMAT HDP CVD and Roth and Rau SiNX CVD tools.
HT4522DC3 220 Grit Diamond ScrubDISK Vacuum Chamber Cleaning ScrubDISKS® with 220 Diamond grit abrasive particles for heavy duty PM procedures. Ideal for Ion Implant, Novellus/AMAT HDP CVD and Roth and Rau SiNX CVD tools.
HT4528DC3 280 Grit Diamond ScrubDISK Vacuum Chamber Cleaning ScrubDISKS® with 280 Diamond grit abrasive particles for heavy duty PM procedures. Ideal for removing medium hardness process residue from Ion Implant, Novellus and AMAT HDP CVD and Roth and Rau SiNX CVD tools.
HT4536DC3 360 Grit Diamond ScrubDISK Vacuum Chamber Cleaning ScrubDISKS® with 360 Diamond grit abrasive particles for medium duty PM procedures. Ideal for removing medium amounts of process residue from wafer processing tools such as LAM 9600 and 2300 Etch chambers, Hitachi Etch chambers, TEL Etch Chambers, Ion Implant, Novellus Speed and AMAT TxZ, WxZ, DxZ, SinGEN, PolyGEN, Endura and Producer CVD, PVD tools and Roth and Rau SiNX CVD tools.
HT4540DC3 400 Grit Diamond ScrubDISK Vacuum Chamber Cleaning ScrubDISKS® with 400 Diamond grit abrasive particles for medium duty PM procedures. Ideal for removing medium amounts of process residue from wafer processing tools such as LAM 9600 and 2300 Etch chambers, Hitachi Etch chambers, TEL Etch Chambers, Ion Implant, Novellus Speed and AMAT TxZ, WxZ, DxZ, SinGEN, PolyGEN, Endura and Producer CVD, PVD tools and Roth and Rau SiNX CVD tools.
HT4580DC3 800 Grit Diamond ScrubDISK Vacuum Chamber Cleaning ScrubDISKS® with 800 Diamond grit abrasive particles for medium to light duty PM procedures. Ideal for wafer processing tools such as LAM 9600 and 2300 Etch chambers, Hitachi Etch chambers, TEL Etch Chambers, Varian Ion Implant Process Areas, Novellus Speed, AMAT TxZ, WxZ, DxZ, SinGEN, PolyGEN, Endura and Producer CVD, PVD tools and Roth and Rau SiNX CVD tools.
HT4513PDC3 1350 Grit Diamond ScrubDISK Vacuum Chamber Cleaning ScrubDISKS® with 1350 Diamond grit abrasive particles for light duty PM procedures. Ideal for final polishing of wafer processing tools including LAM 9600 and 2300 Etch chambers; Hitachi and TEL Etch Chambers; AMAT CVD, PVD and CMP tools such as TxZ, WxZ, DxZ, SinGEN, PolyGEN, Mirra and Reflexion.
HT4520PDC3 2000 Grit Diamond ScrubDISK Vacuum Chamber Cleaning ScrubPADS® with 2000 Diamond grit abrasive particles for very light final polishing of sealing surfaces, ESC's and O-ring grooves in high vacuum chambers.
HT4530PDC3 3000 Grit Diamond ScrubDISK Vacuum Chamber Cleaning ScrubPADS® with 3000 Diamond grit abrasive particles for very light final polishing of sealing surfaces, ESC's and O-ring grooves in high vacuum chambers.
HT4540PDC3 4000 Grit Diamond ScrubDISK Vacuum Chamber Cleaning ScrubPADS® with 4000 Diamond grit abrasive particles for very light final polishing of sealing surfaces, ESC's and O-ring grooves in high vacuum chambers.
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Scotch-Brite™ is a trademark of 3M Corporation