Vacuum Chamber Cleaning ScrubKITS
Foamtec International's Vaccum Chamber Cleaning ScrubKITS®
Vacuum Chamber PM ScrubKITS® are pre-packed maintenance kits containing all the tools necessary to safely PM CVD, Plasma Etch, PVD, PECVD, MOCVD, Ion Implant and ALD Vacuum Chambers.
Vacuum Chamber ScrubKITS® allow Equipment and Process Engineers to strictly control the items used to PM Vacuum Chambers.
ScrubKITS are available for the following Vacuum Chambers: 
- AMAT Centura, Endura, P5000, STI, TxZ ,WxZ, PolyGEN, XGEN, Endura2 Degas, EMAX, Quantum
- Genus ALD
- Hitachi Metal Etch
- INOVA ESC
- Varian Implant
- Axcelis Implant
- LAM 9600, 9400, 2300
- Novellus Concept 1, Concept 2, Concept 3, Speed, Speed Nxt
- Plasma-Therm Versalok Etch
- Roth & Rau PECVD Vacuum Chambers
We continue to work with Process Engineers to develop new ScrubKITS®. Please contact our representative in your area for details and technical information regarding ScrubKITS®.
SouthWest & Western USA: |
Mid-West USA, North America & Europe: |
Asia: |
Eastern USA, Puerto Rico: |
Mustafa Hossaini |
Armand Barrios |
Ryan Jang |
Derek Hodson |
Ph: +1.408.421.1280 |
Ph: +1.480.650.0565 |
Ph: +011.6012.283.9225 |
Ph: +1.919.426.7307 |